Three-dimensional atom probe investigations of Ti-Al-N thin films

Scripta Materialia

Volumn 61, Issue 7, 2009, Pages 725-728

  Rachbauer, R ^a   Stergar, E ^a   Massl, S ^a,b   Moser, M ^a   Mayrhofer, P H ^a  

^a UNIVERSITY OF LEOBEN   (Austria)

^b ERICH SCHMID INSTITUTE OF MATERIALS SCIENCE   (Austria)

Author keywords

Atom probe; PVD; Self organization; Spinodal decomposition; TiAlN

Indexed keywords

ALN; ATOM PROBE; ATOMIC SCALE; ELEMENTAL PROCESS; EXPERIMENTAL EVIDENCE; INTERCONNECTED NETWORK; LASER-ASSISTED; PHASE TRANSFORMATION; PVD; SELF-ORGANIZATION; THREE-DIMENSIONAL ATOM PROBE; THREE-DIMENSIONAL OBSERVATIONS; TIALN;

ALUMINUM; ATOMS; CONDUCTIVE FILMS; PROBES; THERMOANALYSIS; THIN FILMS; THREE DIMENSIONAL; TITANIUM NITRIDE; TOMOGRAPHY;

SPINODAL DECOMPOSITION;

EID: 67651176170     PISSN: 13596462     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.scriptamat.2009.06.015     Document Type: Article

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