SCOPUS 정보 검색 플랫폼

Volumn 93, Issue 14, 2008, Pages

Thermal decomposition products in arc evaporated TiAlN/TiN multilayers

Author keywords

[No Author keywords available]

Indexed keywords

PYROLYSIS;

THERMAL DECOMPOSITION;

DECOMPOSITION;

EID: 53649089937 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2998588 Document Type: Article

Times cited : (75)

References (12)

1
- 0000911315
- 0021-8979 10.1063/1.348849.
- F. Adibi, I. Petrov, L. Hultman, U. Wahlström, T. Shimizu, D. McIntyre, and J. E. Greene, J. Appl. Phys. 0021-8979 10.1063/1.348849 69, 6437 (1991).
- (1991) J. Appl. Phys. , vol.69 , pp. 6437
- Adibi, F.¹ Petrov, I.² Hultman, L.³ Wahlström, U.⁴ Shimizu, T.⁵ McIntyre, D.⁶ Greene, J.E.⁷

2
- 32944455394
- P. H. Mayrhofer, D. Music, and J. M. Schneider, Appl. Phys. Lett. 88, 071922 (2006).
- (2006) Appl. Phys. Lett. , vol.88 , pp. 071922
- Mayrhofer, P.H.¹ Music, D.² Schneider, J.M.³

3
- 33846421973
- 0163-1829 10.1103/PhysRevB.75.045123.
- B. Alling, A. V. Ruban, A. Karimi, O. E. Peil, S. I. Simak, L. Hultman, and I. A. Abrikosov, Phys. Rev. B 0163-1829 10.1103/PhysRevB.75.045123 75, 045123 (2007).
- (2007) Phys. Rev. B , vol.75 , pp. 045123
- Alling, B.¹ Ruban, A.V.² Karimi, A.³ Peil, O.E.⁴ Simak, S.I.⁵ Hultman, L.⁶ Abrikosov, I.A.⁷

4
- 0036747872
- 0734-2101 10.1116/1.1503784.
- A. Hörling, L. Hultman, M. Od́n, J. Sjöĺn, and L. Karlsson, J. Vac. Sci. Technol. A 0734-2101 10.1116/1.1503784 20, 1815 (2002).
- (2002) J. Vac. Sci. Technol. A , vol.20 , pp. 1815
- Hörling, A.¹ Hultman, L.² Od́n, M.³ Sjöĺn, J.⁴ Karlsson, L.⁵

5
- 10944266550
- 0257-8972 10.1016/j.surfcoat.2004.04.056.
- A. Hörling, L. Hultman, M. Od́n, J. Sjöĺn, and L. Karlsson, Surf. Coat. Technol. 0257-8972 10.1016/j.surfcoat.2004.04.056 191, 384 (2005).
- (2005) Surf. Coat. Technol. , vol.191 , pp. 384
- Hörling, A.¹ Hultman, L.² Od́n, M.³ Sjöĺn, J.⁴ Karlsson, L.⁵

6
- 0001149368
- 0021-8979 10.1063/1.363799.
- H. Ljungcrantz, M. Od́n, L. Hultman, J. E. Greene, and J. -E. Sundgren, J. Appl. Phys. 0021-8979 10.1063/1.363799 80, 6725 (1996).
- (1996) J. Appl. Phys. , vol.80 , pp. 6725
- Ljungcrantz, H.¹ Od́n, M.² Hultman, L.³ Greene, J.E.⁴ Sundgren, J.-E.⁵

7
- 0031211710
- 0884-2914 10.1557/JMR.1997.0286.
- M. Od́n, H. Ljungcrantz, and L. Hultman, J. Mater. Res. 0884-2914 10.1557/JMR.1997.0286 12, 2134 (1997).
- (1997) J. Mater. Res. , vol.12 , pp. 2134
- Od́n, M.¹ Ljungcrantz, H.² Hultman, L.³

8
- 0004133128
- (Springer, New York).
- I. C. Noyan and J. B. Cohen, Residual Stress, Measurement by Diffraction and Interpretation (Springer, New York, 1987).
- (1987) Residual Stress, Measurement by Diffraction and Interpretation
- Noyan, I.C.¹ Cohen, J.B.²

9
- 0004234914
- (Pergamon, New York),.
- C. Barret and T. B. Massalki, Structures of Metals (Pergamon, New York, 1980), p. 204.
- (1980) Structures of Metals , pp. 204
- Barret, C.¹ Massalki, T.B.²

10
- 0343462248
- 0040-6090 10.1016/S0040-6090(01)00759-3.
- J. Almer, M. Od́n, and G. Hkansson, Thin Solid Films 0040-6090 10.1016/S0040-6090(01)00759-3 385, 190 (2001).
- (2001) Thin Solid Films , vol.385 , pp. 190
- Almer, J.¹ Od́n, M.² Hkansson, G.³

11
- 39749098910
- 0003-6951 10.1063/1.2838747.
- B. Alling, A. Karimi, L. Hultman, and I. A. Abrikosov, Appl. Phys. Lett. 0003-6951 10.1063/1.2838747 92, 071903 (2008).
- (2008) Appl. Phys. Lett. , vol.92 , pp. 071903
- Alling, B.¹ Karimi, A.² Hultman, L.³ Abrikosov, I.A.⁴

12
- 0041909471
- 1359-6454 10.1016/S1359-6454(03)00378-1.
- D. J. Seol, S. Y. Hu, Y. Hu, Y. L. Li, J. Shen, K. H. Oh, and L. Q. Chen, Acta Mater. 1359-6454 10.1016/S1359-6454(03)00378-1 51, 5173 (2003).
- (2003) Acta Mater. , vol.51 , pp. 5173
- Seol, D.J.¹ Hu, S.Y.² Hu, Y.³ Li, Y.L.⁴ Shen, J.⁵ Oh, K.H.⁶ Chen, L.Q.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.