Investigation on microstructure and mechanical properties of reactively synthesized TiAlN/AlON nanomultilayers

Vacuum

Volumn 86, Issue 9, 2012, Pages 1300-1304

  Li, Wei ^a   Liu, Ping ^a   Wang, Juntao ^a   Ma, Fengcang ^a   Liu, Xinkuan ^a   Chen, Xiaohong ^a   He, Daihua ^a  

^a UNIVERSITY OF SHANGHAI FOR SCIENCE AND TECHNOLOGY   (China)

Author keywords

Epitaxial growth; Magnetron sputtering; Mechanical property; Strengthening mechanism; TiAlN AlON nanomultilayer

Indexed keywords

AMORPHOUS STATE; COHERENT GROWTH; FACE-CENTERED CUBIC; FIELD EMISSION SCANNING ELECTRON MICROSCOPY; HARDNESS AND ELASTIC MODULUS; LAYER THICKNESS; MAXIMUM VALUES; MICROSTRUCTURE AND MECHANICAL PROPERTIES; NANOINDENTATION TECHNIQUES; NANOMULTILAYERS; REACTIVE MAGNETRON SPUTTERING; STRENGTHENING MECHANISM; STRENGTHENING MECHANISMS; TEMPLATE EFFECTS; TIALN/ALON NANOMULTILAYER;

ELASTIC MODULI; EPITAXIAL GROWTH; FIELD EMISSION MICROSCOPES; HARDNESS; INDENTATION; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION;

MICROSTRUCTURE;

EID: 84858996558     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2011.11.019     Document Type: Conference Paper

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