Crystallization of AlON layers and its effects on the microstructure and hardness of reactively synthesized ZrN/AlON nanomultilayers

Journal of Physics D: Applied Physics

Volumn 39, Issue 22, 2006, Pages 4838-4842

  Dong, Yunshan ^a   Yue, Jianling ^a   Liu, Yan ^a   Li, Geyang ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS MATERIALS; CRYSTALLIZATION; EPITAXIAL GROWTH; HARDNESS; MICROSTRUCTURE; MULTILAYERS; SPUTTERING; ZIRCONIUM COMPOUNDS;

ALUMINIUM OXYNITRIDE; NANOMULTILAYERS; ZIRCONIUM NITRIDE;

ALUMINUM COMPOUNDS;

EID: 33846882161     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/39/22/014     Document Type: Article

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