Microstructure and mechanical properties of CrAlN/SiNx nanostructure multilayered coatings

Thin Solid Films

Volumn 518, Issue 5, 2009, Pages 1480-1483

  Tsai, S H ^a   Duh, J G ^a  

^a NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

CrAlN; Multilayer; Nanostructure; SiNx; Texture

Indexed keywords

COHERENT INTERFACE; COLUMNAR STRUCTURES; CRALN; CRITICAL LAYER THICKNESS; LAYER THICKNESS; MAXIMUM HARDNESS; MICROSTRUCTURE AND MECHANICAL PROPERTIES; MULTI-LAYERED; MULTILAYERED COATINGS; PREFERRED ORIENTATIONS; RADIO FREQUENCIES; REACTIVE MAGNETRON SPUTTERING; SINX; XRD PATTERNS;

COATINGS; CRYSTALLINE MATERIALS; MECHANICAL PROPERTIES; MULTILAYERS; NANOSTRUCTURES; TEXTURES;

SILICON NITRIDE;

EID: 70449485070     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.tsf.2009.09.112     Document Type: Article

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