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Volumn 60, Issue 4, 2009, Pages 240-243
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Template-induced coherent growth and mechanical properties of ZrO2/TiN nano-multilayers
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Author keywords
Crystal growth; Hardness; Microstructure; Multilayer thin films; Sputtering
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Indexed keywords
CRYSTAL GROWTH;
CRYSTAL MICROSTRUCTURE;
FILM PREPARATION;
GRAIN BOUNDARIES;
MECHANICAL PROPERTIES;
MULTILAYER FILMS;
THICK FILMS;
TIN;
TITANIUM COMPOUNDS;
TITANIUM NITRIDE;
ZIRCONIUM ALLOYS;
COHERENT GROWTHS;
COHERENT STRAINS;
MULTILAYER THIN FILMS;
ROCK SALT STRUCTURES;
SUPERHARDNESS EFFECTS;
TIN LAYERS;
MULTILAYERS;
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EID: 56249087176
PISSN: 13596462
EISSN: None
Source Type: Journal
DOI: 10.1016/j.scriptamat.2008.10.019 Document Type: Article |
Times cited : (26)
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References (17)
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