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Thin Solid Films

Volumn 478, Issue 1-2, 2005, Pages 170-175

Electrical and optical properties of Zr1-xAlxN thin films

(3) Lamni, R a Sanjines R a Levy F a

a EPFL (Switzerland)

Author keywords

Magnetron sputtering; Optical and electrical properties; Phase transitions; Zr1 xAlxN thin films

Indexed keywords

ALUMINUM; CRYSTALLIZATION; ELECTRIC PROPERTIES; ELECTRONIC STRUCTURE; ELECTRONS; GRAIN BOUNDARIES; MAGNETRON SPUTTERING; NITROGEN; OPTICAL PROPERTIES; PHASE TRANSITIONS; THIN FILMS;

DIFFUSION BARRIERS; METAL VACANCIES; OPTICAL AND ELECTRICAL PROPERTIES; ZR1-XALXN THIN FILMS;

ZIRCONIUM COMPOUNDS;

EID: 14644392872 PISSN: 00406090 EISSN: None Source Type: Journal
DOI: 10.1016/j.tsf.2004.10.049 Document Type: Article

Times cited : (29)

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