Synthesis of nanoscale multilayered ZrN/W2N multilayered coatings by magnetron sputtering

Surface and Coatings Technology

Volumn 201, Issue 15, 2007, Pages 6800-6803

  Wang, M X ^a   Zhang, J J ^a   Yang, J ^a   Wang, L Q ^a   Li, D J ^a  

^a TIANJIN NORMAL UNIVERSITY   (China)

Author keywords

Nanoscale; rf magnetron sputtering; ZrN W2N multilayered coatings

Indexed keywords

HARDNESS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; NANOINDENTATION; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); TUNGSTEN COMPOUNDS; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM COMPOUNDS;

COMPOSITION MODULATION; LAYER STRUCTURE; NANOPROFILER;

MULTILAYERS;

HARDNESS; MAGNETRON SPUTTERING; MECHANICAL PROPERTIES; MULTILAYERS; NANOINDENTATION; SCANNING ELECTRON MICROSCOPY; SYNTHESIS (CHEMICAL); TUNGSTEN COMPOUNDS; X RAY DIFFRACTION ANALYSIS; ZIRCONIUM COMPOUNDS;

EID: 33847384602     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2006.09.067     Document Type: Article

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