Alternating stress field and superhardness effect in TiN/NbN superlattice films

Journal of Vacuum Science and Technology, Part A: Vacuum, Surfaces and Films

Volumn 20, Issue 3, 2002, Pages 674-677

  Geyang, Li ^a   Zenghu, Han ^a   Jiawan, Tian ^a   Junhua, Xu ^a   Mingyuan, Gu ^a  

^a SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

[No Author keywords available]

Indexed keywords

ACETONE; ALCOHOLS; CRYSTAL STRUCTURE; EPITAXIAL GROWTH; LATTICE CONSTANTS; MAGNETRON SPUTTERING; MICROHARDNESS; NIOBIUM COMPOUNDS; SYNTHESIS (CHEMICAL); TITANIUM NITRIDE; TRANSMISSION ELECTRON MICROSCOPY; X RAY DIFFRACTION ANALYSIS;

ALTERNATING STRESS FIELD; INTERFACE STRUCTURE; MICROHARDNESS ANALYSIS; REACTIVE SPUTTER DEPOSITION; STRENGTHENING EFFECT; SUPERHARDNESS EFFECT;

METALLIC SUPERLATTICES;

EID: 0036565054     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1460887     Document Type: Article

References (18)