Factors governing the mechanical behaviour of CrSiN coatings: Combined nanoindentation testing and transmission electron microscopy

Materials Science and Engineering: A

Volumn 534, Issue , 2012, Pages 297-308

  Wo, P C ^a   Munroe, P R ^a   Li, Z ^b   Jiang, Z T ^c   Xie, Z H ^d   Zhou, Z F ^d,e   Li, K Y ^e  

^a UNIVERSITY OF NEW SOUTH WALES   (Australia)

^b SOUTHEAST UNIVERSITY   (China)

^c MURDOCH UNIVERSITY   (Australia)

^d EDITH COWAN UNIVERSITY   (Australia)

^e CITY UNIVERSITY OF HONG KONG   (Hong Kong)

Author keywords

Chromium silicon nitride; Coatings; Deformation structure; Nanoindentation; Transmission electron microscopy (TEM); X ray photoelectron spectroscopy (XPS)

Indexed keywords

AMORPHOUS SILICON; CHROMIUM COMPOUNDS; COATINGS; CRACKS; DEFORMATION; HARDNESS; HIGH RESOLUTION TRANSMISSION ELECTRON MICROSCOPY; LINEAR TRANSFORMATIONS; NANOCOMPOSITES; NANOINDENTATION; RESIDUAL STRESSES; SILICON NITRIDE;

DEFORMATION STRUCTURE; DIRECT LINKS; EVOLUTION BEHAVIOR; MECHANICAL BEHAVIOR; MICROSTRUCTURES AND MECHANICAL PROPERTIES; NANO INDENTATION; NANOINDENTATION TESTING; SI CONTENT; TRANSMISSION ELECTRON MICROSCOPY; X-RAY PHOTOELECTRON SPECTROSCOPY;

X RAY PHOTOELECTRON SPECTROSCOPY;

EID: 84856549430     PISSN: 09215093     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.msea.2011.11.072     Document Type: Article

References (41)

1. Cunha L., Andritschky M., Pischow K., Wang Z. Thin Solid Films 1999, 355-356:465-471.
2. Kim G.S., Kim S.M., Lee S.Y. J. Vac. Sci. Technol. A 2009, A27:873-879.
3. Martinez E., Sanjines R., Karimi A., Esteve J., Levy F. Surf. Coat. Technol. 2004, 180-181:570-574.
4. Patscheider J., Zehnder T., Diserens M. Surf. Coat. Technol. 2001, 146-147:201-208.
5. Veprek S. Surf. Coat. Technol. 1997, 97:15-22.
6. Lee H.Y., Jung W.S., Han J.G., Seo S.M., Kim J.H., Bae Y.H. Surf. Coat. Technol. 2005, 200:1026-1030.
7. Lee J.-W., Chang Y.-C. Surf. Coat. Technol. 2007, 202:831-836.
8. Benkahoul M., Robin P., Gujrathi S.C., Martinu L., Klemberg-Sapieha J.E. Surf. Coat. Technol. 2008, 202:3975-3980.
9. Mercs D., Briois P., Demange V., Lamy S., Coddet C. Surf. Coat. Technol. 2007, 201:6970-6976.
10. Martinez E., Sanjines R., Banakh O., Levy F. Thin Solid Films 2004, 447-448:332-336.
11. Yoo Y.H., Hong J.H., Kim J.G., Lee H.Y., Han J.G. Surf. Coat. Technol. 2007, 201:9518-9523.
12. Wang Q.M., Kim K.H. Acta Mater. 2009, 57:4974-4987.
13. Gall D., Shin C.-S., Spila T., Odén M., Senna M.J.H., Greene J.E., Petrov I. J. Appl. Phys. 2002, 91:3589-3597.
14. Xie Z.H., Hoffman M., Munroe P., Bendavid A., Martin P.J. Acta Mater. 2008, 56:852-861.
15. Wo P.C., Munroe P.R., Zhou Z.F., Li K.Y., Xie Z.H. Mater. Sci. Eng. A 2010, 527:4447-4457.
16. Swadener J.G., Taljat B., Pharr G.M. J. Mater. Res. 2001, 16:2091-2102.
17. Matsue T., Hanabusa T., Ikeuchi Y. Thin Solid Films 1996, 281-282:344-347.
18. Ahmed M.S., Zhao X., Zhou Z.-F., Munroe P., Chen-Tan N., Kwok L., Li Y., Xie Z. J. Am. Ceram. Soc. 2011, 94:1546-1551.
19. Gelfi M., La Vecchia G.M., Lecis N., Troglio S. Surf. Coat. Technol. 2005, 192:263-268.
20. Mayrhofer P.H., Tischler G., Mitterer C. Surf. Coat. Technol. 2001, 142-144:78-84.
21. Shirley D.A. Phys. Rev. B: Solid State 1972, 5:4709-4714.
22. Oliver W.C., Pharr G.M. J. Mater. Res. 1992, 7:1564-1582.
23. Goldfarb I., Pelleg J., Zevin L., Croitoru N. Thin Solid Films 1991, 200:117-127.
24. Oliveira J.C., Manaia A., Dias J.P., Cavaleiro A., Teer D., Taylor S. Surf. Coat. Technol. 2006, 200:6583-6587.
25. Güttler D., Abendroth B., Grötzschel R., Möller W. Appl. Phys. Lett. 2004, 85:6134-6136.
26. Cunha L., Andritschky M., Rebouta L., Pischow K. Surf. Coat. Technol. 1999, 116-119:1152-1160.
27. Grundner M., Halbritter J. J. Appl. Phys. 1980, 51:397-405.
28. Lippitz A., Hubert T. Surf. Coat. Technol. 2005, 200:250-253.
29. Moulder J.F., Stickle W.F., Sobol P.E., Bomben K.D. Hand-book of X-ray Photoelectron Spectroscopy 1992.
30. Yamamoto K., Koga Y., Fujiwara S. Diamond Relat. Mater. 2001, 10:1921-1926.
31. Bhowmick S., Xie Z.H., Hoffman M., Jayaram V., Biswas S.K. J. Mater. Res. 2004, 19:2616-2624.
32. Taljat B., Pharr G.M. Mater. Res. Soc. Symp. Proc. 2000, 519.
33. Johnson K.L. Contact Mechanics 1987, Cambridge University Press, Cambridge.
34. Bhowmick S., Kale A.N., Jayaram V., Biswas S.K. Thin Solid Films 2003, 436:250-258.
35. Ma L.W., Cairney J.M., Hoffman M., Munroe P.R. Surf. Coat. Technol. 2005, 192:11-18.
36. Huber E., Hofmann S. Vacuum 1994, 45:1003-1005.
37. Conde A., Cristóbal A.B., Fuentes G., Tate T., de Damborenea J. Surf. Coat. Technol. 2006, 201:3588-3595.
38. Esaka F., Furuya K., Shimada H., Imamura M., Matsubayashi N., Sato H., Nishijima A., Kawana A., Ichimura H., Kikuchi T. J. Vac. Sci. Technol. A 1997, 15:2521-2528.
39. Xie Z.H., Hoffman M., Munroe P., Singh R., Bendavid A., Martin P.J. J. Mater. Res. 2007, 22:2312-2318.
40. Veprek S., Mannling H.-D., Niederhofer A., Ma D., Mukherjee S. J. Vac. Sci. Technol. B 2004, 22:L5-L9.
41. Veprek S., Veprek-Heijman M.G.J., Karvankova P., Prochazka J. Thin Solid Films 2005, 476:1-29.