Degradation of superhard nanocomposites by built-in impurities

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 22, Issue 2, 2004, Pages

  Veprek, S ^a   Mannling H D ^a   Niederhofer, A ^a   Ma, D ^a,b   Mukherjee, S ^a,c  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^b XI'AN JIAOTONG UNIVERSITY   (China)

^c BHABHA ATOMIC RESEARCH CENTRE   (India)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; COATINGS; CRYSTALLINE MATERIALS; DEGRADATION; FOURIER TRANSFORMS; HARDNESS; IMPURITIES; MONOLAYERS; PHYSICAL VAPOR DEPOSITION; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SEMICONDUCTING SILICON COMPOUNDS; TITANIUM NITRIDE; VOLUME FRACTION; X RAY PHOTOELECTRON SPECTROSCOPY;

BINARY SYSTEMS; COVALENT COMPOUNDS; ELASTIC-RECOIL-DETECTION SPECTROSCOPY (ERD); SCHERRER FORMULA;

NANOSTRUCTURED MATERIALS;

EID: 4644316458     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.1689305     Document Type: Article

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