Microstructure and mechanical properties of Cr-Si-N coatings prepared by pulsed reactive dual magnetron sputtering

Surface and Coatings Technology

Volumn 202, Issue 16, 2008, Pages 3975-3980

  Benkahoul, M ^a   Robin, P ^a   Gujrathi, S C ^b   Martinu, L ^a   Klemberg Sapieha, J E ^a  

^a ÉCOLE POLYTECHNIQUE DE MONTRÉAL   (Canada)

^b UNIVERSITÉ DE MONTRÉAL   (Canada)

Author keywords

Cr Si N; CrN; Microstructure; Nanocomposite; Solid solution hardening

Indexed keywords

GRAIN SIZE AND SHAPE; MECHANICAL PROPERTIES; MICROSTRUCTURAL EVOLUTION; REACTIVE SPUTTERING; SOLID SOLUTIONS;

PULSED REACTIVE DUAL MAGNETRON SPUTTERING;

THIN FILMS;

GRAIN SIZE AND SHAPE; MECHANICAL PROPERTIES; MICROSTRUCTURAL EVOLUTION; REACTIVE SPUTTERING; SOLID SOLUTIONS; THIN FILMS;

EID: 41949130414     PISSN: 02578972     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.surfcoat.2008.02.014     Document Type: Article

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