Comparative studies on the thermal stability and corrosion resistance of CrN, CrSiN, and CrSiN/AlN coatings

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 27, Issue 4, 2009, Pages 873-879

  Kim, Gwang Seok ^a,b   Kim, Sung Min ^a   Lee, Sang Yul ^a   Lee, Bo Young ^a  

^a Hankuk Aviation University   (South Korea)

^b Cheorwon Plasma Research Institute   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

AISI H13 STEEL; AMORPHOUS SI; ANNEALING TESTS; BILAYER PERIOD; COMPARATIVE STUDIES; CORROSION BEHAVIOR; CORROSION CURRENT DENSITIES; CROSS SECTIONAL IMAGE; HARDNESS VALUES; HIGH HARDNESS; MULTI-LAYER-COATING; MULTI-LAYERED; NACL SOLUTION; NITRIDE COATING; OXIDATION BARRIER; POROUS MORPHOLOGY; POTENTIODYNAMIC POLARIZATION TESTS; PROTECTIVE EFFICIENCY; SI(1 0 0); SURFACE REGION; THERMAL STABILITY; UNBALANCED MAGNETRON SPUTTERING;

AMORPHOUS SILICON; ANNEALING; ATOMIC FORCE MICROSCOPY; CHROMIUM; CORROSION RESISTANCE; DIFFUSION COATINGS; HARDNESS; INORGANIC COATINGS; NITRIDES; OXIDATION; OXYGEN; POLARIZATION; POTENTIODYNAMIC POLARIZATION; SEMICONDUCTING SILICON COMPOUNDS; SILICON WAFERS; SODIUM CHLORIDE; SURFACE DIFFUSION; THERMODYNAMIC STABILITY;

CHROMATE COATINGS;

EID: 67650327350     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.3155396     Document Type: Article

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