Small, low-ohmic RF MEMS switches with thin-film package

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2011, Pages 793-796

  Wunnicke, O ^a   Kwinten, H ^a   Van Leuken Peters, L ^a   In't Zandt, M ^a   Reimann, K ^a   Aravindh, V ^a   Suy, H M R ^a   Goossens, M J ^a   Wolters, R A M ^a   Besling, W F A ^a   Van Beek, J T M ^a   Steeneken, P G ^a  

^a NXP SEMICONDUCTORS   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

CIRCULAR MEMBRANES; FOOT-PRINT DEVICES; LOW-TEMPERATURE PROCESS; MEMS SWITCHES; ON-RESISTANCE; RF PERFORMANCE; RF-MEMS SWITCHES; SMALL AREA; SWITCHING SPEED;

ELECTRIC SWITCHES; HERMETIC SEALS; MECHANICAL ENGINEERING; MECHANICS; REACTIVE ION ETCHING;

MEMS;

EID: 79953778066     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2011.5734544     Document Type: Conference Paper

References (11)

1. D. Mercier et al., "Miniature RF MEMS switched capacitors", IEEE MTT-S Microwave Symp. Digest, 2005, pp. 745-748. (Pubitemid 44479043)
2. J. Costa et al., "Silicon RFCMOS SOI Technology with Above-IC MEMS Integration for Front End Wireless Applications", BCTM 2008, 2008, pp. 204-207.
3. Q. Ma et al., "Metal contact reliability of RF MEMS switches", Proc. SPIE, vol. 6463, pp. 646305, 2007.
4. B. Lacroix et al., "Sub-Microsecond RF MEMS Switched Capacitors", IEEE Trans. Microwave Theory and Techn., vol. 55, pp. 1314-1321, 2007.
5. J. Maciel et al., "Lifetime characteristics of ohmic MEMS switches", Proc. SPIE, vol. 5343, pp. 9-14, 2004.
6. G.M. Rebeiz et al., "Tuning in to RF MEMS", IEEE Microwave Magazine, pp. 55-72, Oct. 2009.
7. G.M. Rebeiz, RF MEMS: Theory, Design, and Technology, John Wiley & Sons, pp. 121-155, 2003.
8. H.S. Newman et al., "Lifetime Measurements on a High-Reliability RF-MEMS Contact Switch", IEEE Microwave and Wireless Components Letters, vol. 18, pp. 100-102, 2008. (Pubitemid 351225245)
9. L. Liu, "High Performance RF MEMS Series Contact Switch - Design and Simulations", ECTC, 2007, pp. 158-164
10. H. Shen et al., "DC-Contact RF MEMS Switches using Thin-Film Cantilevers", EuMIC, 2008, pp. 382-385.
11. J.J. Yao et al., "A Surface Micromachined Miniature Switch for Telecommunications Applications with Signal Frequencies from DC up to 4 GHz", The 8th International Conf. on Solid-state Sensors and Actuators, and Eurosensors IX, 1995, pp. 384-387.