Sub-microsecond RF MEMS switched capacitors

IEEE Transactions on Microwave Theory and Techniques

Volumn 55, Issue 6, 2007, Pages 1314-1320

  Lacroix, Benjamin ^b   Pothier, Arnaud ^b   Crunteanu, Aurelian ^b   Cibert, Christophe ^b   Dumas Bouchiat, Frédéric ^b   Champeaux, Corinne ^b   Catherinot, Alain ^b   Blondy, Pierre ^a,b  

^a IEEE   (France)

^b UNIVERSITY OF LIMOGES   (France)

Author keywords

Capacitors; High speed integrated circuits; Micro electromechanical systems (MEMS)

Indexed keywords

HIGH-SPEED INTEGRATED CIRCUITS; METAL OXIDE SEMICONDUCTOR CIRCUITS; PLANAR MICROBEAMS; RESONANCE FREQUENCY;

INTEGRATED CIRCUITS; MEMS; MOS DEVICES; QUARTZ; RELIABILITY ANALYSIS; SWITCHING SYSTEMS;

CAPACITORS;

EID: 34250189563     PISSN: 00189480     EISSN: None     Source Type: Journal    
DOI: 10.1109/TMTT.2007.897760     Document Type: Conference Paper

References (11)

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