A latching capacitive RF MEMS switch in a thin film package

IEEE MTT-S International Microwave Symposium Digest

Volumn , Issue , 2006, Pages 259-262

  Ebel, John L ^a   Cortez, Rebecca ^a   Leedy, Kevin D ^a   Strawser, Richard E ^a  

^a AIR FORCE RESEARCH LABORATORY   (United States)

Author keywords

Microelectromechanical devices; Microwave devices; Microwave switches; RF MEMS

Indexed keywords

DIELECTRIC CHARGING; MICROWAVE SWITCHES; THIN FILM PACKAGE;

CAPACITANCE; CHIP SCALE PACKAGES; ELECTRODES; FLIP FLOP CIRCUITS; MICROELECTROMECHANICAL DEVICES; THIN FILMS;

MEMS;

EID: 34250348761     PISSN: 0149645X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MWSYM.2006.249482     Document Type: Conference Paper

References (6)

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