Parallel-contact metal-contact RF-MEMS switches for high power applications

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2004, Pages 781-784

  Nishijima, Noriyo ^a,b   Hung, Juo Jung ^a   Rebeiz, Gabriel M ^a  

^a UNIVERSITY OF MICHIGAN   (United States)

^b HITACHI LTD   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ACTUATORS; CAPACITANCE; COMPUTER SIMULATION; ELECTROPLATING; ELECTROSTATICS; ENERGY UTILIZATION; RELIABILITY; VOLTAGE CONTROL;

CONTACT MATERIALS; ELECTRICAL DESIGN; MECHANICAL STABILITY; METAL-CONTACT SWITCHES;

MICROELECTROMECHANICAL DEVICES;

EID: 3042778506     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (5)

1. S. Majumder, J. Lampen, R. Morrison and J. Maciel, "A Packaged, High-Lifetime Ohmic MEMS RF Switch," IEEE MTT-S Int. Microwave Symp., pp.1935-1938, June 2003.
2. Robert, Ph., Saias, D., Billard, C., Boret, S., Sillon, N., Maeder-Pachurka, C., Charvet, P.L., Bouche, G., Ancey, P., Berruyer, P., "Integrated RF-MEMS switch based on a combination of thermal and electrostatic actuation," Transducer, Vol.2, pp.1714 -1717, June 2003.
3. Mihailovich, R.E., Kim, M., Hacker, J.B., Sovero, E.A., Studer, J., Higgins, J.A., DeNatale, J.F., "MEM relay for reconfigurable RF circuits," IEEE Microwave and Wireless Components Letters, Vol.11, No.2, pp.53-55, Feb. 2001.
4. th IEEE Int. Conf. on Micro Electro Mechanical Systems, pp.190-194, 1998.
5. Xiaomin Yan, McGruer, N.B., Adams, G.G., Majumder, S. , "Finite element analysis of the thermal characteristics of MEMS switches," Transducer, Vol.1, pp.412 -415, June 2003.