AlN-based BAW resonators with CNT electrodes for gravimetric biosensing

Sensors and Actuators, B: Chemical

Volumn 160, Issue 1, 2011, Pages 1386-1393

  Garcia Gancedo L ^a   Zhu, Z ^a   Iborra, E ^b   Clement, M ^b   Olivares, J ^b   Flewitt, A J ^a   Milne, W I ^a   Ashley, G M ^c   Luo, J K ^c   Zhao, X B ^d   Lu, J R ^d  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^c UNIVERSITY OF BOLTON   (United Kingdom)

^d UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

Aluminum nitride (AlN); Biosensor; Bulk acoustic wave resonator (BAW); Carbon nanotube (CNT); Gravimetric biosensor

Indexed keywords

ACTIVE SURFACE AREA; ALN; BAW RESONATOR; BIOSENSING; BULK ACOUSTIC WAVE RESONATOR; FREQUENCY SHIFT; GRAVIMETRIC SENSITIVITY; HIGHER FREQUENCIES; MASS LOAD; METAL ELECTRODES; METAL THIN FILM; METALLIC ELECTRODES; PROTEIN SOLUTION; QUALITY FACTORS; SENSING LAYERS; SOLIDLY MOUNTED RESONATOR; SURFACE COATINGS; THIN FILM METAL;

ACOUSTIC RESONATORS; ACOUSTICS; ALUMINUM COATINGS; ALUMINUM NITRIDE; BIOSENSORS; CARBON NANOTUBES; COATINGS; ELECTRODES; FREQUENCY RESPONSE; NITRIDES; THIN FILMS;

RESONATORS;

EID: 81155134982     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.09.083     Document Type: Article

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