FBAR-CMOS oscillator array for mass-sensing applications

IEEE Sensors Journal

Volumn 10, Issue 6, 2010, Pages 1042-1047

  Johnston, Matthew L ^a   Kymissis, Ioannis ^a   Shepard, Kenneth L ^a  

^a Department of Earth and Environmental Sciences   (United States)

Author keywords

CMOS; Film bulk acoustic resonator (FBAR); Mass sensor; Sensor array

Indexed keywords

CMOS OSCILLATORS; COUPLED RESONATOR; DRIVE CIRCUITRY; FABRICATION TECHNIQUE; FILM BULK ACOUSTIC RESONATOR (FBAR); FILM BULK ACOUSTIC RESONATORS; HIGH OPERATING FREQUENCY; MASS SENSITIVITY; MASS SENSOR; MONOLITHIC INTEGRATION; OFF-CHIP; OSCILLATOR ARRAYS; PARASITIC LOADS; SENSING APPLICATIONS;

ACOUSTIC SURFACE WAVE FILTERS; CHEMICAL DETECTION; CMOS INTEGRATED CIRCUITS; OXIDE MINERALS; QUARTZ; RESONATORS; SENSOR ARRAYS;

ACOUSTIC RESONATORS;

EID: 77950799147     PISSN: 1530437X     EISSN: None     Source Type: Journal    
DOI: 10.1109/JSEN.2010.2042711     Document Type: Article

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