ZnO-Based FBAR resonators with carbon nanotube electrodes

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 58, Issue 11, 2011, Pages 2438-2445

  García Gancedo, Luis ^a   Al Naimi, Farah ^a   Flewitt, Andrew J ^a   Milne, William I ^a   Ashley, Gregory M ^b   Luo, Jack K ^b   Zhao, Xiubo ^c   Lu, Jian R ^c  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF BOLTON   (United Kingdom)

^c UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

[No Author keywords available]

Indexed keywords

BI-LAYER; CARBON NANOTUBE ELECTRODES; ELASTIC STIFFNESS; FILM BULK ACOUSTIC RESONATORS; LONGITUDINAL ACOUSTIC; LOW DENSITY; MASS LOADING EFFECTS; QUALITY FACTORS; THERMAL CHEMICAL VAPOR DEPOSITION; THREE DIMENSIONAL FINITE ELEMENT ANALYSIS; TRAVELING WAVE; ZNO FILMS;

ACOUSTIC IMPEDANCE; ACOUSTIC RESONATORS; CARBON NANOTUBES; CHEMICAL VAPOR DEPOSITION; ELECTRODES; FABRICATION; FINITE ELEMENT METHOD; FREQUENCY RESPONSE; GOLD DEPOSITS; ZINC OXIDE;

ACOUSTIC SURFACE WAVE FILTERS;

CARBON NANOTUBE; ZINC OXIDE;

ACOUSTICS; ARTICLE; CHEMISTRY; ELECTRODE; EQUIPMENT; EQUIPMENT DESIGN; INSTRUMENTATION; NANOTECHNOLOGY; TRANSDUCER; ULTRASOUND;

ACOUSTICS; ELECTRODES; EQUIPMENT DESIGN; EQUIPMENT FAILURE ANALYSIS; NANOTECHNOLOGY; NANOTUBES, CARBON; SONICATION; TRANSDUCERS; ZINC OXIDE;

EID: 81155147854     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/TUFFC.2011.2100     Document Type: Article

References (29)

1. H. Iwata, "Measured resonance characteristics of a 2-GHz-fundamental quartz resonator," IEEE Trans. Ferroelectr. Ultrason. Freq. Control, vol. 51, no. 8, pp. 1026-1029, 2004.
2. K. M. Lakin and S. J. Wang, "Acoustic bulk wave composite resonators," Appl. Phys. Lett., vol. 38, no. 3, pp. 125-127, 1981.
3. T. Nishihara, T. Yokoyama, T. Miyashita, and Y. Satoh, "High performance and miniature thin film bulk acoustic wave filters for 5 GHz," in IEEE Ultrasonics Symp., 2002, vol. 1, pp. 969-972.
4. R. C. Ruby and P. Bradley, Y. Oshmyansky, A. Chien, and J. D. Larson, III, "Thin film bulk wave acoustic resonators (FBAR) for wireless applications," in IEEE Ultrasonics Symp., 2001, vol. 1, pp. 813-821. (Pubitemid 34277397)
5. M. A. Dubois, J. F. Carpentier, P. Vincent, C. Billard, G. Parat, C. Muller, P. Ancey, and P. Conti, "Monolithic above-IC resonator technology for integrated architectures in mobile and wireless communication," IEEE J. Solid-State Circuits, vol. 41, no. 1, pp. 7-16, 2006. (Pubitemid 43145957)
6. P.-H. Sung, C.-M. Fang, P.-Z. Chang, Y.-C. Chin, and P.-Y. Chen, "The method for integrating FBAR with circuitry on CMOS chip," in Proc. IEEE Int. Frequency Control Symp., 2004, pp. 562-565. (Pubitemid 41755866)
7. M. L. Johnston, I. Kymissis, and K. L. Shepard, "FBAR-CMOS oscillator array for mass-sensing applications," IEEE Sens. J., vol. 10, no. 6, pp. 1042-1047, 2010.
8. P. B. Kirby, M. D. G. Potter, C. P. Williams, and M. Y. Lim, "Thin film piezoelectric property considerations for surface acoustic wave and thin film bulk acoustic resonators," J. Eur. Ceram. Soc., vol. 23, no. 14, pp. 2689-2692, 2003. (Pubitemid 37065645)
9. E. Iborra, M. Clement, J. Capilla, J. Olivares, and V. Felmetsger, "Optimization of thin AlN sputtered films for X-band BAW resonators," in IEEE Ultrasonics Symp., 2010, pp. 1688-1691.
10. G. Ferblantier, F. Mailly, R. Al Asmar, A. Foucaran, and F. Pascal-Delannoy, "Deposition of zinc oxide thin films for application in bulk acoustic wave resonator," Sens. Actuators A, vol. 122, no. 2, pp. 184-188, 2005. (Pubitemid 41101049)
11. S.-H. Choi and J.-S. Kim, "Study on the c-axis preferred orientation of ZnO film on various metal electrodes," Ultramicroscopy, vol. 108, no. 10, pp. 1288-1291, 2008.
12. Y. Q. Fu, J. K. Luo, X. Y. Du, A. J. Flewitt, Y. Li, G. H. Markx, A. J. Walton, and W. I. Milne, "Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: A review," Sens. Actuators B, vol. 143, no. 2, pp. 606-619, 2010.
13. E. D. Kolb and R. A. Laudise, "Hydrothermally grown ZnO crystals of low and intermediate resistivity," J. Am. Ceram. Soc., vol. 49, no. 6, pp. 302-305, 1966.
14. S.-Y. Chu and W. Water, "Influence of postdeposition annealing on the properties of ZnO films prepared by RF magnetron sputtering," J. Eur. Ceram. Soc., vol. 23, no. 10, pp. 1593-1598, 2003. (Pubitemid 36386653)
15. T. Yokoyama, T. Nishihara, S. Taniguchi, M. Iwaki, Y. Satoh, M. Ueda, and T. Miyashita, "New electrode material for low-loss and high Q FBAR filters," in IEEE Ultrasonics Symp., 2004, pp. 429-432. (Pubitemid 40927149)
16. M. Mann, Y. Zhang, K. B. K. Teo, T. Wells, M. M. El Gomati, and W. I. Milne, "Controlling the growth of carbon nanotubes for electronic devices," Microelectron. Eng., vol. 87, no. 5-8, pp. 1491-1493, 2010.
17. S. Liu, Q. Shen, Y. Cao, L. Gan, Z. Wang, M. L. Steigerwald, and X. Guo, "Chemical functionalization of single-walled carbon nanotube field-effect transistors as switches and sensors," Coord. Chem. Rev., vol. 254, no. 9-10, pp. 1101-1116, 2010.
18. A. Star, J. P. Gabriel, K. Bradley, and G. Grüner, "Electronic detection of specific protein binding using nanotube FET devices," Nanoletters, vol. 3, no. 4, pp. 459-463, 2003. (Pubitemid 37140645)
19. P. Qi, O. Vermesh, M. Grecu, A. Javey, Q. Wang, H. Dai, S. Peng, and K. J. Cho, "Toward large arrays of multiplex functionalized carbon nanotube sensors for highly sensitive and selective molecular detection," Nano Lett., vol. 3, no. 4, pp. 347-351, 2003. (Pubitemid 37130508)
20. J. F. Lu, L. Gu, M. J. Meziani, X. Wang, P. G. Luo, L. M. Veca, L. Cao, and Y.-P. Sun, "Advances in bioapplications of carbon nanotubes," Adv. Mater., vol. 21, no. 2, pp. 139-151, 2009.
21. A. Modi, N. Koratkar, E. Lass, B. Wei, and P. M. Ajayan, "Miniaturized gas ionization sensors using carbon nanotubes," Nature, vol. 424, no. 6945, pp. 171-174, 2003. (Pubitemid 36858681)
22. J. Li, A. M. Cassell, and H. Dai, "Carbon nanotubes as AFM tips: Measuring DNA molecules at the liquid/solid interface," Surf. Interface Anal., vol. 28, no. 1, pp. 8-11, 1999.
23. M. Dragoman, A. Muller, D. Neculoiu, D. Vasilache, G. Konstantinidis, K. Grenier, D. Dubuc, L. Bary, R. Plana, and E. Flahaut, "High performance thin film bulk acoustic resonator covered with carbon nanotubes," App. Phys. Lett., vol. 89, no. 14, art. no. 143122, 2006.
24. T. Xu, Z. Wang, and J. Miao, "Fabrication of carbon-nanotube enhanced piezoelectric membrane-based biosensor," in Proc. IEEE Int. Nanoelectrics Conf., 2008, pp. 555-559.
25. M. Mann, K. B. Teo, W. I. Milne, and T. Tessner, "Direct growth of multi-walled carbon nanotubes on sharp tips for electron microscopy," NANO: Brief Rep. Rev., vol. 1, no. 1, pp. 35-39, 2006.
26. A. J. Flewitt, J. D. Dutson, P. Beecher, D. Paul, S. J. Wakeham, M. E. Vickers, C. Ducati, S. P. Speakman, W. I. Milne, and M. J. Thwaites, "Stability of thin film transistors incorporating a zinc oxide or indium zinc oxide channel deposited by a high rate sputtering process," Semicond. Sci. Technol., vol. 24, no. 8, art. no. 085002, 2009.
27. L. García-Gancedo, J. Pedrós, A. J. Flewitt, W. I. Milne, G. M. Ashley, J. Luo, and C. J. B. Ford, "Ultrafast sputtered ZnO thin films with high kT for acoustic wave device applications," in IEEE Ultrasonics Symp., 2010, pp. 1064-1067.
28. "ICD powder diffraction file 36-1451," International Centre for Diffraction Data, Newtown Square, PA, 1996.
29. K. J. Coakley, J. D. Splett, M. D. Janezic, and R. F. Kaiser, "Estimation of Q factors and resonant frequencies," IEEE Trans. Microw. Theory Tech., vol. 51, no. 3, pp. 862-868, 2003.