Spurious vibration suppression by film thickness control for FBAR

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2008, Pages 2193-2196

  Tanifuji, Shoichi ^a   Aota, Yuji ^a   Oguma, Hiroshi ^a   Kameda, Suguru ^a   Takagi, Tadashi ^a   Tsubouchi, Kazuo ^a  

^a TOHOKU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

5 GHZ BAND; ALUMINIUM NITRIDE; ANTIRESONANT FREQUENCY; METALORGANIC CHEMICAL VAPOR DEPOSITION; RESONANT FREQUENCIES; SIMULATION RESULT; THICKNESS MODES; THREE-DIMENSIONAL (3-D) SIMULATION; VIBRATION MECHANISMS; VIBRATION MODES; VIBRATION SUPPRESSION;

ACOUSTIC SURFACE WAVE FILTERS; ALUMINUM COMPOUNDS; MAGNETIC FILMS; METALLORGANIC CHEMICAL VAPOR DEPOSITION; MOLECULAR BEAM EPITAXY; NATURAL FREQUENCIES; NITRIDES; ORGANIC CHEMICALS; ORGANOMETALLICS;

ACOUSTIC EQUIPMENT;

EID: 67649383871     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2008.0543     Document Type: Conference Paper

References (5)

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5. Y. Aota, S. Tanifuji, H. Oguma, S. Kameda, H. Nakase, T. Takagi, K. Tsubouchi, IEEE Ultrason. Symp. (2007) P1H-4.