High performance thin film bulk acoustic resonator covered with carbon nanotubes

Applied Physics Letters

Volumn 89, Issue 14, 2006, Pages

  Dragoman, M ^a   Muller, A ^a   Neculoiu, D ^a   Vasilache, D ^a   Konstantinidis, G ^b   Grenier, K ^c   Dubuc, D ^c   Bary, L ^c   Plana, R ^c   Flahaut, E ^d  

^a NATIONAL INSTITUTE FOR RESEARCH AND DEVELOPMENT IN MICROTECHNOLOGIES   (Romania)

^b INSTITUTE OF COMPUTER SCIENCE   (Greece)

^c LAAS CNRS   (France)

^d INSTITUT CARNOT CIRIMAT   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC STANDING WAVES; NANOTUBE THIN FILMS; QUALITY FACTOR; RESONATOR ELECTRODES;

ACOUSTIC IMPEDANCE; ACOUSTIC RESONATORS; ACOUSTIC WAVES; CARBON NANOTUBES; ELASTIC MODULI; GALLIUM NITRIDE; MIXTURES;

THIN FILMS;

EID: 33749462941     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2358838     Document Type: Article

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