Fabrication of high-Q film bulk acoustic resonator (FBAR) filters withcarbon nanotube (CNT) electrodes

Proceedings - IEEE Ultrasonics Symposium

Volumn , Issue , 2010, Pages 301-304

  Garcia Gancedo, L ^a   Al Naimi, F ^a   Flewitt, A J ^a   Milne, W I ^a   Ashley, G M ^b   Luo, J K ^b   Zhao, X B ^c   Lu, J R ^c  

^a UNIVERSITY OF CAMBRIDGE   (United Kingdom)

^b UNIVERSITY OF BOLTON   (United Kingdom)

^c UNIVERSITY OF MANCHESTER   (United Kingdom)

Author keywords

carbon nanotube (CNT); FBAR; Q factor; zinc oxide (ZnO)

Indexed keywords

ELEMENT ANALYSIS; FBAR; FILM BULK ACOUSTIC RESONATOR FILTERS; LOW DENSITY; NUMERICAL RESULTS; Q-FACTORS; BI-LAYER; ELASTIC STIFFNESS; MULTI-PHYSICS; TRAVELLING WAVES;

ACOUSTIC IMPEDANCE; ACOUSTIC RESONATORS; CARBON NANOTUBES; ELECTRODES; FABRICATION; ULTRASONICS; ZINC OXIDE; FINITE ELEMENT METHOD; FREQUENCY RESPONSE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 80054084914     PISSN: 10510117     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ULTSYM.2010.5935514     Document Type: Conference Paper

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