Resonant piezoelectric AlN-actuated microcantilevers for detection of antigen/antibody interactions

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 8066, Issue , 2011, Pages

  Oliver, M J ^a   Hernando Garcia, J ^a   Ababneh, A ^b   Seidel, H ^c   Schmid, U ^d   Olivares, J ^e   Iborra, E ^e   Pobedinskas, P ^f   Haenen, K ^f   Sanchez Rojas, J L ^a  

^a UNIVERSITY OF CASTILLA LA MANCHA   (Spain)

^b YARMOUK UNIVERSITY   (Jordan)

^c SAARLAND UNIVERSITY   (Germany)

^d VIENNA UNIVERSITY OF TECHNOLOGY   (Austria)

^e UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

^f HASSELT UNIVERSITY   (Belgium)

Author keywords

Electric measurements; Immunosensor; Liquid media; Piezoelectric cantilevers; Polycrystalline AlN

Indexed keywords

ACTUATION MATERIALS; ALN; BIODETECTION; ELECTRICAL ACTUATION; FULLY COMPATIBLE; HIGH-FREQUENCY MODE; LEAD ZIRCONATE TITANATE; LIQUID MEDIA; MASS DETECTION; MICRO-CANTILEVERS; PIEZOELECTRIC CANTILEVERS; PIEZOELECTRIC FILM; POLYCRYSTALLINE; POLYCRYSTALLINE ALUMINIUM; RESONANT MICROCANTILEVERS; SILICON TECHNOLOGIES; SILICON-BASED DEVICES;

ALUMINUM COMPOUNDS; ATOMIC FORCE MICROSCOPY; COMPOSITE MICROMECHANICS; IMMUNOSENSORS; LEAD OXIDE; LIQUIDS; MONOLAYERS; NANOCANTILEVERS; NITRIDES; PIEZOELECTRICITY; POLYCRYSTALLINE MATERIALS; SEMICONDUCTING LEAD COMPOUNDS; SMART SENSORS; VANADIUM; ZINC OXIDE;

PIEZOELECTRIC ACTUATORS;

EID: 79960505378     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.887010     Document Type: Conference Paper

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