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Volumn 108, Issue 10, 2008, Pages 1288-1291
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Study on the c-axis preferred orientation of ZnO film on various metal electrodes
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Author keywords
Orientation; Piezoelectricity; ZnO
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Indexed keywords
ACOUSTIC EQUIPMENT;
ACOUSTIC RESONATORS;
ACOUSTIC SURFACE WAVE DEVICES;
ACOUSTIC SURFACE WAVE FILTERS;
ACOUSTIC WAVE VELOCITY;
ACOUSTIC WAVES;
ACOUSTICS;
AIR FILTERS;
ATOMIC FORCE MICROSCOPY;
CRYSTAL STRUCTURE;
CRYSTALLOGRAPHY;
ELECTRIC CURRENTS;
ELECTRODES;
ELECTROLYSIS;
IMAGING TECHNIQUES;
METALLIC FILMS;
METALLIZING;
METALS;
PHOTORESISTS;
PLATINUM;
REACTIVE SPUTTERING;
SEMICONDUCTING ZINC COMPOUNDS;
SILICON;
SILICON WAFERS;
SURFACE ROUGHNESS;
SURFACE STRUCTURE;
THICK FILMS;
WAVE ENERGY CONVERSION;
X RAY ANALYSIS;
ZINC ALLOYS;
ZINC OXIDE;
C -AXIS;
COLUMNAR STRUCTURES;
FILM BULK ACOUSTIC RESONATOR;
GAS SENSORS;
METAL ELECTRODES;
ORIENTATION;
PIEZOELECTRICITY;
PREFERRED ORIENTATION;
PT ELECTRODE;
SCANNING ELECTRON MICROSCOPY (SEM);
SI-WAFER;
SURFACE ACOUSTIC WAVE DEVICES;
X-RAY DIFFRACTION;
ZNO;
ZNO FILMS;
ZNO THIN FILMS;
GOLD;
ALUMINUM;
GOLD;
PLATINUM;
SILICON;
ZINC OXIDE;
ARTICLE;
ATOMIC FORCE MICROSCOPY;
CRYSTAL STRUCTURE;
ELECTRODE;
EVAPORATION;
PIEZOELECTRICITY;
SCANNING ELECTRON MICROSCOPE;
SCANNING PROBE MICROSCOPY;
TEMPERATURE SENSITIVITY;
X RAY DIFFRACTION;
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EID: 50149087291
PISSN: 03043991
EISSN: None
Source Type: Journal
DOI: 10.1016/j.ultramic.2008.04.028 Document Type: Article |
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Times cited : (16)
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References (7)
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