Gas sensors based on gravimetric detection - A review

Sensors and Actuators, B: Chemical

Volumn 160, Issue 1, 2011, Pages 804-821

  Fanget, S ^a   Hentz, S ^a,b   Puget, P ^a   Arcamone, J ^a   Matheron, M ^a   Colinet, E ^a,b   Andreucci, P ^a   Duraffourg, L ^a   Meyers, Ed ^b   Roukes, M L ^b  

^a CEA LETI   (France)

^b CALIFORNIA INSTITUTE OF TECHNOLOGY   (United States)

Author keywords

Gas sensor; Gravimetric detection; Micro electromechanical system; Nano electromechanical system

Indexed keywords

ACOUSTIC SURFACE WAVE DEVICES; ACOUSTIC WAVES; CHEMICAL SENSORS; ELECTROMECHANICAL DEVICES; GAS ADSORPTION; GAS DETECTORS; MEMS; NEMS; ULTRASONIC APPLICATIONS; ULTRASONIC TRANSDUCERS;

ADSORPTION MECHANISM; ELECTROMECHANICAL SYSTEMS; GAS SENSING APPLICATIONS; GRAVIMETRIC DETECTIONS; MICRO ELECTRO MECHANICAL SYSTEM; MICRO-MACHINED ULTRASONIC TRANSDUCER; NANO ELECTROMECHANICAL SYSTEMS; SURFACE ACOUSTIC WAVES;

GASES;

EID: 81155123014     PISSN: 09254005     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.snb.2011.08.066     Document Type: Article

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