Mass sensitive thin film bulk acoustic wave resonators

Proceedings of the IEEE International Frequency Control Symposium and Exposition

Volumn , Issue , 2006, Pages 111-116

  Loschonsky, M ^a   Eisele, D ^a   Reindl, L M ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

POLARIZATION; RESONATORS; THIN FILMS; VAPOR DEPOSITION;

STATISTICAL ERRORS; SYSTEMATICAL ERRORS; THERMAL CHAMBER;

ACOUSTIC WAVES;

EID: 39349104583     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2006.275361     Document Type: Conference Paper

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3. K. M. Lakin, Thin Film Resonator Technology, IEEE Trans Ultrason Ferroelectr Freq Control. 2005, 52, pp 707-716
4. S. Kullback, Information Theory and Statistics, Dover Publications, 1959
5. S. Kay, Fundamentals of Statistical Signal Processing Vol I & II, Prentice Hall, 1993
6. S. Schodowski, Resonator Self-Temperature-Sensing Using a Dual-Harmonic-Mode Crystal Oscillator, Proc. 43rd Annual Symposium on Frequency Control, pp. 2-7, 1989