Thermal analysis and characterization of a high Q film bulk acoustic resonator (FBAR) as biosensers in liquids

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 939-942

  Zhang, Xu ^a   Xu, Wencheng ^a   Tamijani, Abbas Abbaspour ^a   Chae, Junseok ^a  

^a AZ 85281   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ACOUSTIC WAVELENGTH; BIOSENSING APPLICATIONS; FEEDBACK APPROACH; FILM BULK ACOUSTIC RESONATORS; HIGH QUALITY FACTORS; HIGHLY SENSITIVE; LIQUID ENVIRONMENT; MICROFLUIDIC CHANNEL; OSCILLATION FREQUENCY; PIERCE OSCILLATOR; STATE-OF-THE-ART DEVICES; TEMPERATURE COEFFICIENT; TEMPERATURE STABILITY; THERMAL ANALYSIS; THERMAL DRIFTS; THERMAL STABILITY; ZNO;

ACOUSTIC RESONATORS; ACOUSTICS; LIQUIDS; RESONATORS; SYSTEM STABILITY; THERMOANALYSIS; ZINC; ZINC OXIDE;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 65949119541     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805539     Document Type: Conference Paper

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