Highly sensitive detection of DMMP using a CMUT-based chemical sensor

Proceedings of IEEE Sensors

Volumn , Issue , 2010, Pages 2122-2126

  Lee, H J ^a   Park, K K ^a   Kupnik, M ^a   Oralkan, O ^a   Khuri Yakub, B T ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AIR FLOW; ALLAN DEVIATION; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; DETECTOR CALIBRATION; DIMETHYL METHYLPHOSPHONATE; FREQUENCY-SELECTIVE COMPONENTS; FUNCTIONALIZED; HIGHLY SENSITIVE; LIMIT OF DETECTION; LINCOLN LABORATORY; LOW CONCENTRATIONS; LOW NOISE; MASS RESOLUTION; MASS SENSITIVITY; POLYMER LAYERS; RESONANT SENSORS; SANDIA NATIONAL LABORATORIES; SENSOR PERFORMANCE; SENSOR RESPONSE; SYSTEM NOISE;

CALIBRATION; CHEMICAL DETECTION; FUNCTIONAL POLYMERS; OSCILLATING FLOW; OSCILLATORS (ELECTRONIC); ULTRASONIC APPLICATIONS; ULTRASONIC TRANSDUCERS;

SENSORS;

EID: 79951864042     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2010.5690493     Document Type: Conference Paper

References (12)

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