A low-noise oscillator based on a multi-membrane cmut for high sensitivity resonant chemical sensors

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2009, Pages 761-764

  Lee, H J ^a   Park, K K ^a   Cristman, P ^a   Oralkan, O ^a   Kupnik, M ^a   Yakub, B T Khuri ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALLAN DEVIATION; CAPACITIVE MICROMACHINED ULTRASONIC TRANSDUCER; COLPITTS; COLPITTS OSCILLATORS; FREQUENCY NOISE; HIGH SENSITIVITY; IN-VACUUM; LOW NOISE; MASS RESOLUTION; MASSIVE PARALLELISM; MEMS OSCILLATORS; MOTIONAL IMPEDANCE; OFFSET FREQUENCIES;

ELECTRIC NETWORK TOPOLOGY; ELECTROACOUSTIC TRANSDUCERS; MEMS; MICROELECTROMECHANICAL DEVICES; RESONATORS; TOPOLOGY; ULTRASONIC TRANSDUCERS;

OSCILLATORS (ELECTRONIC);

EID: 65949088832     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/MEMSYS.2009.4805494     Document Type: Conference Paper

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