Mercury ion sensing by film-bulk-acoustic-resonator mass sensor

Proceedings of IEEE Sensors

Volumn 2005, Issue , 2005, Pages 203-206

  Zhang, Hao ^a   Marma, Mong S ^b   Kim, Eun Sok ^a   McKenna, Charles E ^b   Thompson, Mark E ^b  

^a University of Southern California   (United States)

^b UNIVERSITY OF SOUTHERN CALIFORNIA   (United States)

Author keywords

FBAR; Mass sensor; Mercury ion sensing

Indexed keywords

ACOUSTIC RESONATORS; CONCENTRATION (PROCESS); GOLD; MERCURY (METAL); NATURAL FREQUENCIES; POSITIVE IONS; THIN FILMS;

AMALGAMATES; FILM BULK ACOUSTIC RESONATORS (FBAR); MASS SENSORS; MERCURY ION SENSING;

CHEMICAL SENSORS;

EID: 33847336993     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICSENS.2005.1597671     Document Type: Conference Paper

References (5)

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