Mass sensitivity of multilayer thin film resonant BAW sensors

Sensors and Actuators, A: Physical

Volumn 148, Issue 1, 2008, Pages 88-95

  Wingqvist, G ^a   Yantchev, V ^a   Katardjiev, I ^a  

^a UPPSALA UNIVERSITY   (Sweden)

Author keywords

Bulk acoustic resonator; FBAR; Mass sensitivity; Sensitivity amplification

Indexed keywords

ACOUSTIC IMPEDANCE; ACOUSTIC RESONATORS; ACOUSTIC WAVE REFLECTION; FILM PREPARATION; MULTILAYERS; THIN FILMS;

BULK ACOUSTIC RESONATORS; FBAR; MASS SENSITIVITY; MULTI-LAYER THIN FILM; OPTIMIZED STRUCTURES; SECOND HARMONIC MODE; SENSING APPLICATIONS; TRANSMISSION LINE MODELING;

ACOUSTIC SURFACE WAVE FILTERS;

EID: 55349084363     PISSN: 09244247     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.sna.2008.07.023     Document Type: Article

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