Focused ion beam-based nanoimprint stamp for replicating micro/nanostructures under low temperature

Journal of Micro/Nanolithography, MEMS, and MOEMS

Volumn 9, Issue 3, 2010, Pages

  Sun, Hongwen ^a   Guogao, Liu ^a   Lin, Shanming ^a   Liu, Jingquan ^b   Chen, Di ^b  

^a HOHAI UNIVERSITY   (China)

^b SHANGHAI JIAO TONG UNIVERSITY   (China)

Author keywords

FIB; Low temperature; Microstructures; Nanoimprint; Nanostructures

Indexed keywords

ATOMIC FORCE MICROSCOPY; FOCUSED ION BEAMS; NANOSTRUCTURES;

FIB; IMPRINT TEMPERATURE; LOW TEMPERATURE; LOW TEMPERATURES; MICRO/NANOSTRUCTURES; NANO-GRATING STRUCTURES; NANO-IMPRINT; NANOIMPRINT STAMPS; SURFACE PROFILES;

NANOIMPRINT LITHOGRAPHY;

EID: 80455145299     PISSN: 19325150     EISSN: 19325134     Source Type: Journal    
DOI: 10.1117/1.3469818     Document Type: Conference Paper

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