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Microelectronic Engineering

Volumn 32, Issue 1-4 SPEC. ISS., 1996, Pages 159-171

Nanofabrication by FIB

(1) Gamo, Kenji a

a OSAKA UNIVERSITY (Japan)

Author keywords

FIB systems; Nanofabrication

Indexed keywords

FOCUSING; ION BEAM LITHOGRAPHY; ION IMPLANTATION; NANOTECHNOLOGY; PATTERN RECOGNITION; QUANTUM ELECTRONICS;

ION BEAMS;

EID: 0030231711 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/0167-9317(96)00003-2 Document Type: Article

Times cited : (61)

References (39)

1
- 0001373569
- T. Hiramoto, Y. Hirakawa, Y. Iye and T. Ikoma, Appl. Phys. Lett. 54 (1989) 2103.
- (1989) Appl. Phys. Lett. , vol.54 , pp. 2103
- Hiramoto, T.¹ Hirakawa, Y.² Iye, Y.³ Ikoma, T.⁴

2
- 0040055006
- Y. Hirayama, T. Saku and Y. Horikoshi, Phys. Rev. B 39 (1989) 5535.
- (1989) Phys. Rev. B , vol.39 , pp. 5535
- Hirayama, Y.¹ Saku, T.² Horikoshi, Y.³

3
- 21544458252
- A.D. Wieck and P. Ploog, Appl. Phys. Lett. 56 (1990) 928.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 928
- Wieck, A.D.¹ Ploog, P.²

4
- 0003831994
- Springer, Berlin
- S. Nakata, Science and Technology of Mesoscopic Structures, Springer, Berlin (1992) 299.
- (1992) Science and Technology of Mesoscopic Structures , pp. 299
- Nakata, S.¹

5
- 0007916373
- E. Miyauchi and H. Hashimoto, J. Vac. Sci. Technol. A4 (1986) 933.
- (1986) J. Vac. Sci. Technol. , vol.A4 , pp. 933
- Miyauchi, E.¹ Hashimoto, H.²

6
- 0001071631
- R.L. Seliger, J.W., Ward, V. Wang and R.L. Kubena, Appl. Phys. Lett. 34 (1979) 310.
- (1979) Appl. Phys. Lett. , vol.34 , pp. 310
- Seliger, R.L.¹ Ward, J.W.² Wang, V.³ Kubena, R.L.⁴

7
- 0000658324
- R.L. Kubena, J.W. Ward, F.P. Stratton, R.J. Joyce and G.M. Atkinson, J. Vac. Sci. Technol. B9 (1991) 3079.
- (1991) J. Vac. Sci. Technol. , vol.B9 , pp. 3079
- Kubena, R.L.¹ Ward, J.W.² Stratton, F.P.³ Joyce, R.J.⁴ Atkinson, G.M.⁵

8
- 0029275663
- T. Ishitani and Y. Kawanami, J. Vac. Sci. Technol. B13 (1995) 371.
- (1995) J. Vac. Sci. Technol. , vol.B13 , pp. 371
- Ishitani, T.¹ Kawanami, Y.²

9
- 0006677619
- R.L. Kubena and J.W. Ward, Appl. Phys. Lett. 51 (1987) 1960.
- (1987) Appl. Phys. Lett. , vol.51 , pp. 1960
- Kubena, R.L.¹ Ward, J.W.²

10
- 0023015591
- K.D. Cummings, L.R. Harriott, G.C. Chi and F.W. Ostermayer Jr, SPIE 632 (1986) 93.
- (1986) SPIE , vol.632 , pp. 93
- Cummings, K.D.¹ Harriott, L.R.² Chi, G.C.³ Ostermayer F.W., Jr.⁴

11
- 30244505145
- San Diego
- J. Yanagisawa, K. Kito K. Monden and K. Gamo Proc. 1995 SPIE Meeting, San Diego 1995. S. Hirohata, T. Kosugi, H. Sawaragi, R. Aihara and K. Gamo, J. Vac. Sci. Technol. B10 (1992) 2814.
- (1995) Proc. 1995 SPIE Meeting
- Yanagisawa, J.¹ Kito, K.² Monden, K.³ Gamo, K.⁴

12
- 0039666999
- J. Yanagisawa, K. Kito K. Monden and K. Gamo Proc. 1995 SPIE Meeting, San Diego 1995. S. Hirohata, T. Kosugi, H. Sawaragi, R. Aihara and K. Gamo, J. Vac. Sci. Technol. B10 (1992) 2814.
- (1992) J. Vac. Sci. Technol. , vol.B10 , pp. 2814
- Hirohata, S.¹ Kosugi, T.² Sawaragi, H.³ Aihara, R.⁴ Gamo, K.⁵

13
- 30244434452
- Cambridge Univ., Engineering Dept. Report No. CUED/BELECT/TR 45
- E. Munro, Cambridge Univ., Engineering Dept. Report No. CUED/BELECT/TR 45, 1975.
- (1975)
- Munro, E.¹

14
- 0038092556
- S. Matsui, Y. Kojima, and Y. Ochiai, Appl. Phys. Lett. 53 (1988) 868-870.
- (1988) Appl. Phys. Lett. , vol.53 , pp. 868-870
- Matsui, S.¹ Kojima, Y.² Ochiai, Y.³

15
- 21544438001
- Wei Chen and Haroon Ahmed, Appl. Phys. Lett. 62 (1993) 1499.
- (1993) Appl. Phys. Lett. , vol.62 , pp. 1499
- Chen, W.¹ Ahmed, H.²

16
- 0022144523
- Fumiaki Emoto, Kenji Gamo and Susumu Namba, Japan J. Appl. Phys. 24 (1995) L809.
- (1995) Japan J. Appl. Phys. , vol.24
- Emoto, F.¹ Gamo, K.² Namba, S.³

17
- 0000658324
- R.L. Kubena, J.W. Ward, F.P. Stratton, R.J. Joyce and G.M. Atkinson, J. Vac. Sci. Technol. B9 (1991) 3079.
- (1991) J. Vac. Sci. Technol. , vol.B9 , pp. 3079
- Kubena, R.L.¹ Ward, J.W.² Stratton, F.P.³ Joyce, R.J.⁴ Atkinson, G.M.⁵

18
- 0004930030
- T. Shiokawa, K. Ishibashi, P.H. Kim, Y. Aoyagi, K. Toyoda and S. Namba, Japan J. Appl. Phys. 29 (1990) 2864.
- (1990) Japan J. Appl. Phys. , vol.29 , pp. 2864
- Shiokawa, T.¹ Ishibashi, K.² Kim, P.H.³ Aoyagi, Y.⁴ Toyoda, K.⁵ Namba, S.⁶

19
- 0029408013
- A. Orth, J.P. Reithmaier, F. Faller and A. Forchel, J. Vac. Sci. Technol., B13 (1995) 2714.
- (1995) J. Vac. Sci. Technol. , vol.B13 , pp. 2714
- Orth, A.¹ Reithmaier, J.P.² Faller, F.³ Forchel, A.⁴

20
- 0345833726
- S. Matsui and K. Mon. J. Vac. Sci. Technol. B5 (1987) 853.
- (1987) J. Vac. Sci. Technol. , vol.B5 , pp. 853
- Matsui, S.¹ Mon, K.²

21
- 0022594391
- H. Morimoto H. Onodera T. Kato Y. Sasaki K. Saito and T. Kato J. Vac. Sci. Technol. B4 (1986) 205.
- (1986) J. Vac. Sci. Technol. , vol.B4 , pp. 205
- Morimoto, H.¹ Onodera, H.² Kato, T.³ Sasaki, Y.⁴ Saito, K.⁵ Kato, T.⁶

22
- 0029404972
- K. Suzuki, T. Kinoshita, M. Yamashita, N. Kawakami and A. Nakaue, J. Vac. Sci. Technol., B13 (1995) 2593.
- (1995) J. Vac. Sci. Technol. , vol.B13 , pp. 2593
- Suzuki, K.¹ Kinoshita, T.² Yamashita, M.³ Kawakami, N.⁴ Nakaue, A.⁵

23
- 30244529212
- to be published
- W.H. Brunger, H. Loschner W. Fallmann, W. Finkelstein and J. Melngailis, Japan J. Appl. Phys., to be published.
- Japan J. Appl. Phys.
- Brunger, W.H.¹ Loschner, H.² Fallmann, W.³ Finkelstein, W.⁴ Melngailis, J.⁵

24
- 26844503918
- R.L. Kubena, R.J. Joyce, J.W. Ward, H.L. Garvin, F.P. Stratton and R.G. Brault, J. Vac. Sci. Technol. B6 (1988) 353.
- (1988) J. Vac. Sci. Technol. , vol.B6 , pp. 353
- Kubena, R.L.¹ Joyce, R.J.² Ward, J.W.³ Garvin, H.L.⁴ Stratton, F.P.⁵ Brault, R.G.⁶

25
- 0343305179
- H. Miyake, Y. Yuba, K. Gamo and S. Namba, T. Shiokawa, J. Vac. Sci. Technol. B6 (1988) 1001.
- (1988) J. Vac. Sci. Technol. , vol.B6 , pp. 1001
- Miyake, H.¹ Yuba, Y.² Gamo, K.³ Namba, S.⁴ Shiokawa, T.⁵

26
- 36549095077
- K. Nakamura, D.C. Tsui, K. Nakamura, F. Nihei, H. Toyoshima and T. Ito, Appl. Phys. Lett. 56 (1990) 385.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 385
- Nakamura, K.¹ Tsui, D.C.² Nakamura, K.³ Nihei, F.⁴ Toyoshima, H.⁵ Ito, T.⁶

27
- 0037803140
- Y.J. Li, S. Sasa, W. Beinstingl, M.S. Miller, Z. Xu, G. Snider and P.M. Petroff, J. Vac. Sci. Technol. B9 (1991) 3456.
- (1991) J. Vac. Sci. Technol. , vol.B9 , pp. 3456
- Li, Y.J.¹ Sasa, S.² Beinstingl, W.³ Miller, M.S.⁴ Xu, Z.⁵ Snider, G.⁶ Petroff, P.M.⁷

28
- 0000024261
- S. Sasa, M.S. Miller, Y.J. Li, Z. Xu, K. Ensslin and P.M. Petroff, Appl. Phys. Lett. 57 (1990) 2259.
- (1990) Appl. Phys. Lett. , vol.57 , pp. 2259
- Sasa, S.¹ Miller, M.S.² Li, Y.J.³ Xu, Z.⁴ Ensslin, K.⁵ Petroff, P.M.⁶

29
- 0041464165
- T. Fujisawa, T. Saku, Y. Hirayama and S. Tarucha, Appl. Phys. Lett. 63 (1993) 51.
- (1993) Appl. Phys. Lett. , vol.63 , pp. 51
- Fujisawa, T.¹ Saku, T.² Hirayama, Y.³ Tarucha, S.⁴

30
- 84914323165
- Y. Hirayama and H. Okamoto, J. Vac. Sci. Technol. B6 (1988) 1018.
- (1988) J. Vac. Sci. Technol. , vol.B6 , pp. 1018
- Hirayama, Y.¹ Okamoto, H.²

31
- 4243192688
- S.J. Yu, H. Asahi, J. Takizawa, K. Asami, S. Emura, S. Gonda, H. Kubo, C. Hamaguchi and Y. Hirayama, J. Vac. Sci. Technol. B9 (1991) 2683.
- (1991) J. Vac. Sci. Technol. , vol.B9 , pp. 2683
- Yu, S.J.¹ Asahi, H.² Takizawa, J.³ Asami, K.⁴ Emura, S.⁵ Gonda, S.⁶ Kubo, H.⁷ Hamaguchi, C.⁸ Hirayama, Y.⁹

32
- 0013058048
- H. Arimoto, J. Vac. Sci. Technol. B9 (1991) 2675.
- (1991) J. Vac. Sci. Technol. , vol.B9 , pp. 2675
- Arimoto, H.¹

33
- 30244458054
- J. Yanagisawa, A. Nozawa, Y. Yuba, S. Takaoka, K. Murase and K. Gamo, Mat. Res. Soc. Proc. 359 (1995) 165.
- (1995) Mat. Res. Soc. Proc. , vol.359 , pp. 165
- Yanagisawa, J.¹ Nozawa, A.² Yuba, Y.³ Takaoka, S.⁴ Murase, K.⁵ Gamo, K.⁶

34
- 0027876364
- F. Wakaya, Y. Yuba, S. Takaoka, K. Murase and K. Gamo, Japan J. Appl. Phys. 32 (1993) 6242.
- (1993) Japan J. Appl. Phys. , vol.32 , pp. 6242
- Wakaya, F.¹ Yuba, Y.² Takaoka, S.³ Murase, K.⁴ Gamo, K.⁵

35
- 0343746927
- L.R. Harriott, H. Tempkin, R.A. Ham, J. Weiner and M.B. Panish, J. Vac. Sci. Technol. B7 (1989) 1467.
- (1989) J. Vac. Sci. Technol. , vol.B7 , pp. 1467
- Harriott, L.R.¹ Tempkin, H.² Ham, R.A.³ Weiner, J.⁴ Panish, M.B.⁵

36
- 0040253629
- Y. Sugimoto, K. Akita, M. Taneya and H. Hidaka, Appl. Phys. Lett. 57 (1990) 1012.
- (1990) Appl. Phys. Lett. , vol.57 , pp. 1012
- Sugimoto, Y.¹ Akita, K.² Taneya, M.³ Hidaka, H.⁴

37
- 0342908968
- J.A. Dagata, J. Schneir, H.H. Harary, C.J. Evans, M.T. Postek and J. Bennett, Appl. Phys. Lett. 56 (1990) 2001.
- (1990) Appl. Phys. Lett. , vol.56 , pp. 2001
- Dagata, J.A.¹ Schneir, J.² Harary, H.H.³ Evans, C.J.⁴ Postek, M.T.⁵ Bennett, J.⁶

38
- 0027846929
- H.J. Lezec, J. Ahopelto, A. Usui and Y. Ochiai, Japan J. Appl. Phys. 32 (1993) 6251.
- (1993) Japan J. Appl. Phys. , vol.32 , pp. 6251
- Lezec, H.J.¹ Ahopelto, J.² Usui, A.³ Ochiai, Y.⁴

39
- 30244444745
- Microelectronic Engineering 32 (1996) 75-110
- (1996) Microelectronic Engineering , vol.32 , pp. 75-110

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