A progress review of proton beam writing applications in microphotonics

Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms

Volumn 231, Issue 1-4, 2005, Pages 364-371

  Bettiol, A A ^a   Sum, T C ^a   Cheong, F C ^a   Sow, C H ^a   Venugopal Rao, S ^a   Van Kan, J A ^a   Teo, E J ^a   Ansari, K ^a   Watt, F ^a  

^a NATIONAL UNIVERSITY OF SINGAPORE   (Singapore)

Author keywords

Gratings; Microlens arrays; Photonics; Proton beam writing; Waveguides

Indexed keywords

CRYSTAL LATTICES; LITHOGRAPHY; OPTICAL WAVEGUIDES; REFRACTIVE INDEX;

GRATINGS; MICROLENS ARRAYS; PHOTONICS; PROTON BEAM WRITING;

PROTON BEAMS;

EID: 29344456567     PISSN: 0168583X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.nimb.2005.01.084     Document Type: Conference Paper

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