Tri-material multilayer coatings with high reflectivity and wide bandwidth for 25 to 50 nm extreme ultraviolet light

Optics Express

Volumn 17, Issue 24, 2009, Pages 22102-22107

  Aquila, A ^a   Salmassi, F ^a   Liu, Yanwei ^a   Gullikson, E M ^a  

^a LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BANDWIDTH; CARBIDES; REFLECTION;

EXTREME ULTRA-VIOLET LIGHTS; HIGH HARMONIC GENERATION; HIGH REFLECTIVITY; MULTI-LAYER-COATING; NORMAL INCIDENCE; SOLAR TELESCOPE; WAVELENGTH RANGES; WIDE BANDWIDTH;

MULTILAYERS;

EID: 72449124654     PISSN: None     EISSN: 10944087     Source Type: Journal    
DOI: 10.1364/OE.17.022102     Document Type: Article

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