SCOPUS 정보 검색 플랫폼

Journal of Physics and Chemistry of Solids

Volumn 72, Issue 12, 2011, Pages 1393-1396

Influence of the active layer thickness on the electrical properties of ZnO thin film transistors fabricated by radio frequency magnetron sputtering

(7) Huang, Hai Qin a Liu, Feng Juan a Sun, Jian a Zhao, Jian Wei a Hu, Zuo Fu a Li, Zhen Jun a Zhang, Xi Qing a

a BEIJING JIAOTONG UNIVERSITY (China)

Author keywords

A. Inorganic compounds; A. Oxides; D. Electrical properties

Indexed keywords

A. INORGANIC COMPOUNDS; A. OXIDES; ACTIVE LAYER; ELECTRICAL PROPERTY; FIELD-EFFECT MOBILITIES; HIGH TEMPERATURE; ON/OFF RATIO; RADIO FREQUENCY MAGNETRON SPUTTERING; ZNO; ZNO ACTIVE LAYERS; ZNO THIN FILM;

ELECTRIC FIELD EFFECTS; FILM THICKNESS; INORGANIC COMPOUNDS; MAGNETRON SPUTTERING; METALLIC FILMS; OPTICAL FILMS; RADIO; RADIO WAVES; SILICON COMPOUNDS; THIN FILM DEVICES; THIN FILM TRANSISTORS; THIN FILMS; TRANSISTORS; ZINC OXIDE;

ELECTRIC PROPERTIES;

EID: 80054940914 PISSN: 00223697 EISSN: None Source Type: Journal
DOI: 10.1016/j.jpcs.2011.07.005 Document Type: Article

Times cited : (21)

References (24)

1
- 0037450269
- P.F. Carcia, R.S. McLean, M.H. Reilly, and G. Nunes Appl. Phys. Lett. 82 2003 1117 1119
- (2003) Appl. Phys. Lett. , vol.82 , pp. 1117-1119
- Carcia, P.F.¹ McLean, R.S.² Reilly, M.H.³ Nunes, G.⁴

2
- 0942299445
- H.S. Bae, M.H. Yoon, J.H. Kim, and Seongil Im Appl. Phys. Lett. 83 2003 5313 5315
- (2003) Appl. Phys. Lett. , vol.83 , pp. 5313-5315
- Bae, H.S.¹ Yoon, M.H.² Kim, J.H.³ Im, S.⁴

3
- 34547453761
- Dhananjay, and S.B. Krupanidhi J. Appl. Phys. 101 2007 123717-1 123717-6
- (2007) J. Appl. Phys. , vol.101 , pp. 1237171-1237176
- Dhananjay¹ Krupanidhi, S.B.²

4
- 41449092578
- R. Navamathavan, Chi Kyu Choi, Eun-Jeong Yang, Jae-Hong Lim, Dae-Kue Hwang, and Seong-Ju Park Solid State Electron 52 2008 813 816
- (2008) Solid State Electron , vol.52 , pp. 813-816
- Navamathavan, R.¹ Choi, C.K.² Yang, E.-J.³ Lim, J.-H.⁴ Hwang, D.-K.⁵ Park, S.-J.⁶

5
- 74349112287
- Cheol Hyoun Ahn, Dong Kyu Seo, Chang Ho Woo, and Hyung Koun Cho Physica B 404 2009 4835 4838
- (2009) Physica B , vol.404 , pp. 4835-4838
- Ahn, C.H.¹ Seo, D.K.² Woo, C.H.³ Cho, H.K.⁴

6
- 76049097865
- Nam Gyu Cho, Dong Hun Kima, Ho-Gi Kima, Jae-Min Hong, and Il-Doo Kim Thin Solid Films 518 2010 2843 2846
- (2010) Thin Solid Films , vol.518 , pp. 2843-2846
- Cho, N.G.¹ Kima, D.H.² Kima, H.-G.³ Hong, J.-M.⁴ Kim, I.-D.⁵

7
- 22944469098
- E. Fortunato, P. Barquinha, A. Pimentel, A. Gonçalves, A. Marques, L. Pereira, and R. Martins Thin Solid Films 487 2005 205 211
- (2005) Thin Solid Films , vol.487 , pp. 205-211
- Fortunato, E.¹ Barquinha, P.² Pimentel, A.³ Gonçalves, A.⁴ Marques, A.⁵ Pereira, L.⁶ Martins, R.⁷

8
- 77649286518
- Sang Yeol Lee, Seongpil Chang, and Jae-Sang Lee Thin Solid Films 518 2010 3030 3032
- (2010) Thin Solid Films , vol.518 , pp. 3030-3032
- Lee, S.Y.¹ Chang, S.² Lee, J.-S.³

9
- 16244382410
- Elvira M.C. Fortunato, Pedro M.C. Barquinha, Ana C.M.B.G. Pimentel, Alexandra M.F. Goncalves, Antonio J.S. Marques, Luis M.N. Pereira, and Rodrigo F.P. Martins Adv. Mater. 17 2005 590 594
- (2005) Adv. Mater. , vol.17 , pp. 590-594
- Fortunato, E.M.C.¹ Barquinha, P.M.C.² Pimentel, A.C.M.B.G.³ Goncalves, A.M.F.⁴ Marques, A.J.S.⁵ Pereira, L.M.N.⁶ Martins, R.F.P.⁷

10
- 30944463810
- Hua-Chi Cheng, Chia-Fu Chen, and Cheng-Chung Lee Thin Solid Films 498 2006 142 145
- (2006) Thin Solid Films , vol.498 , pp. 142-145
- Cheng, H.-C.¹ Chen, C.-F.² Lee, C.-C.³

11
- 57049092273
- Jungyol Jo, Ogweon Seo, Hyoshik Choi, and Byeonggon Lee Appl. Phys. Express 1 2008 041202-1 041202-3
- (2008) Appl. Phys. Express , vol.1 , pp. 0412021-0412023
- Jo, J.¹ Seo, O.² Choi, H.³ Lee, B.⁴

12
- 39649124244
- Xin-An Zhang, Jing-Wen Zhang, Wei-Feng Zhang, Dong Wang, Zhen Bi, Xu-Ming Bian, and Xun Hou Thin Solid Films 516 2008 3305 3308
- (2008) Thin Solid Films , vol.516 , pp. 3305-3308
- Zhang, X.-A.¹ Zhang, J.-W.² Zhang, W.-F.³ Wang, D.⁴ Bi, Z.⁵ Bian, X.-M.⁶ Hou, X.⁷

13
- 40749146283
- Paik-Kyun Shin, Yoichiro Aya, Tomoaki Ikegami, and Kenji Ebihara Thin Solid Films 516 2008 3767 3771
- (2008) Thin Solid Films , vol.516 , pp. 3767-3771
- Shin, P.-K.¹ Aya, Y.² Ikegami, T.³ Ebihara, K.⁴

14
- 77950523727
- Gang Xiong, G.A.C. Jones, R. Rungsawang, and D. Anderson Thin Solid Films 518 2010 4019 4023
- (2010) Thin Solid Films , vol.518 , pp. 4019-4023
- Xiong, G.¹ Jones, G.A.C.² Rungsawang, R.³ Anderson, D.⁴

15
- 43949087179
- J.H. Chung, J.Y. Lee, H.S. Kim, N.W. Jang, and J.H. Kim Thin Solid Films 516 2008 5597 5601
- (2008) Thin Solid Films , vol.516 , pp. 5597-5601
- Chung, J.H.¹ Lee, J.Y.² Kim, H.S.³ Jang, N.W.⁴ Kim, J.H.⁵

16
- 34249724977
- Byeong-Yun Oh, Min-Chang Jeong, Moon-Ho Ham, and Jae-Min Myoung Semicond. Sci. Technol. 22 2007 608 612
- (2007) Semicond. Sci. Technol. , vol.22 , pp. 608-612
- Oh, B.-Y.¹ Jeong, M.-C.² Ham, M.-H.³ Myoung, J.-M.⁴

17
- 43049157966
- Liang Zhang, Hao Zhang, Yu Bai, Jun Wei Ma, Jin Cao, Xue Yin Jiang, and Zhi Lin Zhang Solid State Commun. 146 2008 387 390
- (2008) Solid State Commun. , vol.146 , pp. 387-390
- Zhang, L.¹ Zhang, H.² Bai, Y.³ Wei Ma, J.⁴ Cao, J.⁵ Yin Jiang, X.⁶ Lin Zhang, Z.⁷

18
- 70350099288
- C.Y. Liu, H.Y. Xu, L. Wang, X.H. Li, and Y.C. Liu J. Appl. Phys. 106 2009 073518-1 073518-4
- (2009) J. Appl. Phys. , vol.106 , pp. 0735181-0735184
- Liu, C.Y.¹ Xu, H.Y.² Wang, L.³ Li, X.H.⁴ Liu, Y.C.⁵

19
- 33745785089
- C.C. Liu, Y.S. Chen, and J.J. Huang Electron. Lett. 42 2006 824 825
- (2006) Electron. Lett. , vol.42 , pp. 824-825
- Liu, C.C.¹ Chen, Y.S.² Huang, J.J.³

20
- 68949101240
- Christophe Avis, Se Hwan Kim, Ji Ho Hur, Jin Jang, and W.I. Milnea Electrochem. Solid State Lett. 12 2009 J93 J95
- (2009) Electrochem. Solid State Lett. , vol.12
- Avis, C.¹ Hwan Kim, S.² Ho Hur, J.³ Jang, J.⁴ Milnea, W.I.⁵

21
- 63649152574
- R. Navamathavana, Chi Kyu Choi, and Seong-Ju Park J. Alloys Compd. 475 2009 889 892
- (2009) J. Alloys Compd. , vol.475 , pp. 889-892
- Navamathavana, R.¹ Choi, C.K.² Park, S.-J.³

22
- 77955715275
- L. Zhang, J. Li, X.W. Zhang, D.B. Yu, H.P. LinKhizar-ul-Haq, X.Y. Jiang, and Z.L. Zhang Curr. Appl. Phys. 10 2010 1306 1308
- (2010) Curr. Appl. Phys. , vol.10 , pp. 1306-1308
- Zhang, L.¹ Li, J.² Zhang, X.W.³ Yu, D.B.⁴ Linkhizar-Ul-Haq, H.P.⁵ Jiang, X.Y.⁶ Zhang, Z.L.⁷

23
- 0037415828
- R.L. Hoffman, B.J. Norris, and J.F. Wager Appl. Phys. Lett. 82 2003 733 735
- (2003) Appl. Phys. Lett. , vol.82 , pp. 733-735
- Hoffman, R.L.¹ Norris, B.J.² Wager, J.F.³

24
- 33744780986
- P. Barquinha, A. Pimentel, A. Marques, L. Pereira, R. Martins, and E. Fortunato J. Non-Cryst. Solids 352 2006 1749 1752
- (2006) J. Non-Cryst. Solids , vol.352 , pp. 1749-1752
- Barquinha, P.¹ Pimentel, A.² Marques, A.³ Pereira, L.⁴ Martins, R.⁵ Fortunato, E.⁶

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