High-performance ZnO thin-film transistors fabricated at low temperature on glass substrates

Electronics Letters

Volumn 42, Issue 14, 2006, Pages 824-825

  Liu, C C ^a   Chen, Y S ^a   Huang, J J ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; GLASS; MAGNETRON SPUTTERING; SATURATION (MATERIALS COMPOSITION); SUBSTRATES; ZINC OXIDE;

DEPOSITION RATE; GLASS SUBSTRATE; SATURATION REGION; ZNO THIN-FILM TRANSISTOR (TFT);

THIN FILM TRANSISTORS;

EID: 33745785089     PISSN: 00135194     EISSN: None     Source Type: Journal    
DOI: 10.1049/el:20061518     Document Type: Article

References (9)

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