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Volumn 1, Issue 4, 2008, Pages 0412021-0412023
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Enhancement-mode ZnO thin-film transistor grown by metalorganic chemical vapor deposition
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Author keywords
[No Author keywords available]
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Indexed keywords
CHEMICAL OXYGEN DEMAND;
GROWTH (MATERIALS);
LOW PRESSURE CHEMICAL VAPOR DEPOSITION;
METALLORGANIC CHEMICAL VAPOR DEPOSITION;
OXIDATION;
OXYGEN;
OXYGEN VACANCIES;
SEMICONDUCTING ALUMINUM COMPOUNDS;
SEMICONDUCTING ORGANIC COMPOUNDS;
SEMICONDUCTING ZINC COMPOUNDS;
THIN FILM DEVICES;
THIN FILM TRANSISTORS;
THRESHOLD VOLTAGE;
VAPORS;
ZINC;
ZINC OXIDE;
ENHANCEMENT MODES;
HIGH QUALITIES;
LAYER GROWTHS;
METALORGANIC CHEMICAL VAPOR DEPOSITIONS;
ON/OFF RATIOS;
OXIDATION TIMES;
OXYGEN DEFICIENCIES;
ZINC ALLOYS;
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EID: 57049092273
PISSN: 18820778
EISSN: 18820786
Source Type: Journal
DOI: 10.1143/APEX.1.041202 Document Type: Article |
Times cited : (20)
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References (10)
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