Optimization of postgrowth electron-beam curing for focused electron-beam-induced Pt deposits

Journal of Vacuum Science and Technology B

Volumn 29, Issue 5, 2011, Pages

  Plank, Harald ^a   Kothleitner, Gerald ^a   Hofer, Ferdinand ^a   Michelitsch, Stephan G ^b   Gspan, Christian ^b   Hohenau, Andreas ^c   Krenn, Joachim ^c  

^a GRAZ UNIVERSITY OF TECHNOLOGY   (Austria)

^b Graz Centre for Electron Microscopy   (Austria)

^c UNIVERSITY OF GRAZ   (Austria)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEPOSITS; ELECTRON BEAM LITHOGRAPHY; ELECTRON BEAMS; ELECTRON IRRADIATION; ELECTRONS; MOLECULES; NANOCRYSTALS; SOLVENTS;

CURING EFFICIENCY; ELECTRICALLY CONDUCTIVE; ELECTRON BEAM CURING; ELECTRON BEAM ENERGY; FOCUSED ELECTRON BEAMS; ORDERS OF MAGNITUDE; PERCOLATION PATH; PRECURSOR MOLECULES;

CURING;

EID: 80053523330     PISSN: 21662746     EISSN: 21662754     Source Type: Journal    
DOI: 10.1116/1.3622314     Document Type: Article

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