Evolution of the nanostructure of deposits grown by electron beam induced deposition

Applied Physics Letters

Volumn 93, Issue 2, 2008, Pages

  Li, Juntao ^a   Toth, Milos ^b   Tileli, Vasiliki ^a   Dunn, Kathleen A ^a   Lobo, Charlene J ^b   Thiel, Bradley L ^a  

^a STATE UNIVERSITY OF NEW YORK   (United States)

^b Thermo Fisher Scientific   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DEPOSITS; ELECTRON BEAMS; IMAGING TECHNIQUES; PARTICLE BEAMS;

ELECTRON BEAM-INDUCED DEPOSITION (EBID); ENVIRONMENTAL SCANNING ELECTRON MICROSCOPY (ESEM); EVOLUTION (CO); NANO STRUCTURING;

ELECTRON GUNS;

EID: 47549099794     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2959112     Document Type: Article

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