A tunable strain sensor using nanogranular metals

Sensors (Switzerland)

Volumn 10, Issue 11, 2010, Pages 9847-9856

  Schwalb, Christian H ^a,b   Grimm, Christina ^a   Baranowski, Markus ^a   Sachser, Roland ^a   Porrati, Fabrizio ^a   Reith, Heiko ^c   Das, Pintu ^a   Müller, Jens ^a   Völklein, Friedemann ^c   Kaya, Alexander ^b   Huth, Michael ^a  

^a GOETHE UNIVERSITY   (Germany)

^b Nanoscale Systems GmbH   (Germany)

^c RHEINMAIN UNIVERSITY OF APPLIED SCIENCES   (Germany)

Author keywords

Cantilevers; Electron beam induced deposition; Granular metals; Strain sensors

Indexed keywords

CANTILEVERS; ELECTRICAL CONDUCTIVITY; ELECTRON BEAM-INDUCED DEPOSITION; ELECTRON-BEAM IRRADIATIONS; FOCUSED ELECTRON-BEAM-INDUCED DEPOSITIONS; GRANULAR METALS; MASK-LESS LITHOGRAPHY; STRAIN SENSORS;

DEPOSITION; ELECTRIC CONDUCTIVITY; ELECTRON BEAMS; GRANULAR MATERIALS; LITHOGRAPHY; NANOCANTILEVERS;

NANOSENSORS;

METAL NANOPARTICLE;

ARTICLE; CHEMISTRY; METHODOLOGY; MICROELECTROMECHANICAL SYSTEM; NANOTECHNOLOGY;

METAL NANOPARTICLES; MICRO-ELECTRICAL-MECHANICAL SYSTEMS; NANOTECHNOLOGY;

EID: 84871077048     PISSN: 14248220     EISSN: None     Source Type: Journal    
DOI: 10.3390/s101109847     Document Type: Article

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