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Volumn 22, Issue 11, 2011, Pages 1667-1673

Temperature dependence of the dielectric properties of mesoporous silica films prepared by a sol-gel route in the presence of polyether modified polydimethylsiloxane

Author keywords

[No Author keywords available]

Indexed keywords

FIELD EMISSION SCANNING ELECTRON MICROSCOPY; MESOPOROUS SILICA FILM; POROUS SILICA FILMS; SIDE-CHAINS; SILICA FILM; SOL-GEL ROUTES; TEMPERATURE DEPENDENCE; TETRA-ETHYL-ORTHO-SILICATE;

EID: 80053345591     PISSN: 09574522     EISSN: 1573482X     Source Type: Journal    
DOI: 10.1007/s10854-011-0343-8     Document Type: Article
Times cited : (3)

References (28)
  • 1
    • 0035908553 scopus 로고    scopus 로고
    • Spin-on mesoporous silica films with ultralow dielectric constants, ordered pore structures, and hydrophobic surfaces
    • DOI 10.1002/1521-4095(200107)13:14<1099::AID-ADMA1099>3.0.CO;2-0
    • CM Yang AT Cho FM Pan TG Tsai KJ Chao 2001 Adv. Mater. 13 1099 10.1002/1521-4095(200107)13:14<1099::AID-ADMA1099>3.0.CO;2-0 1:CAS:528:DC%2BD3MXlvVSntrw%3D (Pubitemid 32698071)
    • (2001) Advanced Materials , vol.13 , Issue.14 , pp. 1099-1102
    • Yang, C.M.1    Cho, A.T.2    Pan, F.M.3    Tsai, T.G.4    Chao, K.J.5
  • 3
    • 33845238244 scopus 로고    scopus 로고
    • Porosity effects on properties of mesoporous silica low- k films prepared using tetraethylorthosilicate with different templates
    • DOI 10.1149/1.2388852
    • CY Ting HS Sheu WF Wu BZ Wan 2007 J. Electrochem. Soc. 154 G1 10.1149/1.2388852 1:CAS:528:DC%2BD2sXht1yhtQ%3D%3D (Pubitemid 44866337)
    • (2007) Journal of the Electrochemical Society , vol.154 , Issue.1
    • Ting, C.-Y.1    Sheu, H.-S.2    Wu, W.-F.3    Wan, B.-Z.4
  • 8
    • 20544461138 scopus 로고    scopus 로고
    • Skeletal silica characterization in porous-silica low-dielectric-constant films by infrared spectroscopic ellipsometry
    • DOI 10.1063/1.1903108, 113504
    • S Takada N Hata Y Seino N Fujii T Kikkawa 2005 J. Appl. Phys. 97 113504 10.1063/1.1903108 (Pubitemid 40844734)
    • (2005) Journal of Applied Physics , vol.97 , Issue.11 , pp. 1-5
    • Takada, S.1    Hata, N.2    Seino, Y.3    Fujii, N.4    Kikkawa, T.5
  • 10
    • 0036748823 scopus 로고    scopus 로고
    • Preparation and characteristics of porous silica films by a modified base-catalyzed sol-gel process containing PVA: II. Film preparation
    • DOI 10.1023/A:1019951909928
    • Y Liu H Chen L Zhang X Yao 2002 J. Sol-Gel. Sci. Technol. 25 103 10.1023/A:1019951909928 1:CAS:528:DC%2BD38Xms1Ckt70%3D (Pubitemid 35186163)
    • (2002) Journal of Sol-Gel Science and Technology , vol.25 , Issue.2 , pp. 103-111
    • Liu, Y.1    Chen, H.2    Zhang, L.3    Yao, X.4
  • 11
    • 1642515887 scopus 로고    scopus 로고
    • Mesoporous Silicates Prepared Using Preorganized Templates in Supercritical Fluids
    • DOI 10.1126/science.1092627
    • RA Pai R Humayun MT Schulberg A Sengupta JN Sun JJ Watkins 2004 Science 303 507 10.1126/science.1092627 1:CAS:528:DC%2BD2cXlt1entA%3D%3D (Pubitemid 38120845)
    • (2004) Science , vol.303 , Issue.5657 , pp. 507-510
    • Pai, R.A.1    Humayun, R.2    Schulberg, M.T.3    Sengupta, A.4    Sun, J.-N.5    Watkins, J.J.6
  • 12
    • 18644377063 scopus 로고    scopus 로고
    • Surface modified silica mesoporous films as a low dielectric constant intermetal dielectric
    • DOI 10.1063/1.1499979
    • S Yu TKS Wong K Pita X Hu V Ligatchev 2002 J. Appl. Phys. 92 3338 10.1063/1.1499979 1:CAS:528:DC%2BD38Xms1egu7w%3D (Pubitemid 35209275)
    • (2002) Journal of Applied Physics , vol.92 , Issue.6 , pp. 3338
    • Yu, S.1    Wong, T.K.S.2    Pita, K.3    Hu, X.4    Ligatchev, V.5
  • 14
    • 35949029886 scopus 로고
    • 10.1103/PhysRevB.19.4292 1:CAS:528:DyaE1MXks1Glsrg%3D
    • FL Galeener 1979 Phys. Rev. B 19 4292 10.1103/PhysRevB.19.4292 1:CAS:528:DyaE1MXks1Glsrg%3D
    • (1979) Phys. Rev. B , vol.19 , pp. 4292
    • Galeener, F.L.1
  • 15
    • 36549090717 scopus 로고
    • 10.1063/1.346213 1:CAS:528:DyaK3cXmt1SntLY%3D
    • RM Almeida CG Pantano 1990 J. Appl. Phys. 68 4225 10.1063/1.346213 1:CAS:528:DyaK3cXmt1SntLY%3D
    • (1990) J. Appl. Phys. , vol.68 , pp. 4225
    • Almeida, R.M.1    Pantano, C.G.2
  • 18
    • 0034317852 scopus 로고    scopus 로고
    • Sol-gel-derived mesoporous silica films with low dielectric constants
    • DOI 10.1002/1521-4095(200011)12:22<1695::AID-ADMA1695>3.0.CO;2-V
    • S Seraji Y Wu M Forbess SJ Limmer T Chou GZ Cao 2000 Adv. Mater. 12 1695 10.1002/1521-4095(200011)12:22<1695::AID-ADMA1695>3.0.CO;2-V 1:CAS:528:DC%2BD3MXjs1WitA%3D%3D (Pubitemid 32085511)
    • (2000) Advanced Materials , vol.12 , Issue.22 , pp. 1695-1698
    • Seraji, S.1    Wu, Y.2    Forbess, M.3    Limmer, S.J.4    Chou, T.5    Cao, G.6
  • 19
    • 4344637518 scopus 로고    scopus 로고
    • 10.1016/j.ceramint.2003.12.059 1:CAS:528:DC%2BD2cXmvVGmtr8%3D
    • L Li LY Zhang X Yao 2004 Ceram. Int. 30 1843 10.1016/j.ceramint.2003.12. 059 1:CAS:528:DC%2BD2cXmvVGmtr8%3D
    • (2004) Ceram. Int. , vol.30 , pp. 1843
    • Li, L.1    Zhang, L.Y.2    Yao, X.3
  • 23
    • 0003583632 scopus 로고    scopus 로고
    • Oxford University Press New York
    • J. Mark, Polymer Data Handbook (Oxford University Press, New York, 1999), p. 425
    • (1999) Polymer Data Handbook , pp. 425
    • Mark, J.1
  • 24
    • 0035284053 scopus 로고    scopus 로고
    • 10.1016/S0032-3861(00)00652-2 1:CAS:528:DC%2BD3cXosFeltbo%3D
    • G Camino SM Lomakin M Lazzari 2001 Polymer 42 2395 10.1016/S0032-3861(00) 00652-2 1:CAS:528:DC%2BD3cXosFeltbo%3D
    • (2001) Polymer , vol.42 , pp. 2395
    • Camino, G.1    Lomakin, S.M.2    Lazzari, M.3
  • 28
    • 18644377063 scopus 로고    scopus 로고
    • Surface modified silica mesoporous films as a low dielectric constant intermetal dielectric
    • DOI 10.1063/1.1499979
    • S Yu TKS Wong K Pita X Hu V Ligatchev 2002 J. Appl. Phys. 92 3338 10.1063/1.1499979 1:CAS:528:DC%2BD38Xms1egu7w%3D (Pubitemid 35209275)
    • (2002) Journal of Applied Physics , vol.92 , Issue.6 , pp. 3338
    • Yu, S.1    Wong, T.K.S.2    Pita, K.3    Hu, X.4    Ligatchev, V.5


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.