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Materials Science and Engineering: B

Volumn 118, Issue 1-3, 2005, Pages 289-292

Oxidation of macroporous silicon for thick thermal insulation

(2) Kan, P Y Y a Finstad, T G a

a UNIVERSITY OF OSLO (Norway)

Author keywords

Etching; Oxidation; Porous material; Silicon; Silicon oxide

Indexed keywords

CHEMICAL SENSORS; CONCENTRATION (PROCESS); ELECTROLYTIC CELLS; ETCHING; OXIDATION; POROUS MATERIALS; SILICON COMPOUNDS; THERMAL CONDUCTIVITY; THERMAL INSULATION;

MACROPOROUS SILICON; NARROW CHANNELS; SILICON OXIDES; THICK THERMAL INSULATION;

SILICON;

EID: 15344350445 PISSN: 09215107 EISSN: None Source Type: Journal
DOI: 10.1016/j.mseb.2004.12.044 Document Type: Conference Paper

Times cited : (27)

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