Sol-gel-derived mesoporous silica films with low dielectric constants

Advanced Materials

Volumn 12, Issue 22, 2000, Pages 1695-1698

  Seraji, Seana ^a   Wu, Yun ^a   Forbess, Michael ^a   Limmer, Steven J ^a   Chou, Tammy ^a   Cao, Guozhong ^a  

^a University of Washington   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

AGING OF MATERIALS; DIELECTRIC PROPERTIES; GELATION; HEAT TREATMENT; MICROSTRUCTURE; OLIGOMERS; PERMITTIVITY; POROSITY; SCANNING ELECTRON MICROSCOPY; TEMPERATURE; THERMOGRAVIMETRIC ANALYSIS;

AGING EFFECT; METHYLTRIETHOXYSILANE; OPTICAL IMAGING PROFILOMETER; SOL-GEL PROCESS;

SILICA;

EID: 0034317852     PISSN: 09359648     EISSN: None     Source Type: Journal    
DOI: 10.1002/1521-4095(200011)12:22<1695::AID-ADMA1695>3.0.CO;2-V     Document Type: Article

References (17)

1. W. W. Lee, P. S. Ho, MRS Bull. 1997, 22, 19.
2. Low-Dielectric Constant Materials II, Vol. 443 (Eds: A. Lagendijk, H. Treichel, K. J. Uram, A. C. Jones), Materials Research Society, Pittsburgh, PA 1997.
3. N. H. Hendricks, Mater. Res. Soc. Proc. 1997, 443, 3.
4. R. D. Miller, J. L. Hedrick, D. Y. Yoon, R. F. Cook, J. P. Hummel, MRS Bull. 1997, 22, 44.
5. A. T. Kohl, R. Mimna, R. Shick, L. Rhodes, Z. L. Wang, P. A. Kohl, Electrochem. Solid-State Lett. 1999, 2, 77.
6. Y. Xu, Y.-P. Tsai, K. N. Tu, B. Zhao, Q.-Z. Liu, M. Brongo, G. T. Sheng, C. H. Tung, Appl. Phys. Lett. 1999, 75, 853.
7. S. Baskaran, J. Liu, K. Domansky, N. Kohler, X. Li, C. Coyle, G. E. Freyxell, S. Thevutharampillai, R. E. Williford, Adv. Mater. 2000, 12, 291.
8. D. Zhao, P. Yang, N. Melosh, J. Feng, B. F. Chmelka, G. D. Stucky, Adv. Mater. 1998, 10, 1380.
9. C. Jin, J. D. Luttermer, D. M. Smith, T. A. Ramos, MRS Bull. 1997, 22, 39.
10. C. B. Case, C. J. Case, A. Kornblit, M. E. Mills, D. Castillo, R. Liu, Mater. Res. Soc. Proc. 1997, 443, 177.
11. A. J. Moulson, J. M. Herbert, Electroceramics, Chapman and Hall, London 1990.
12. C. M. Chan, G. Z. Cao, H. Fong, M. Sarikaya, T. Robinson, L. Nelson, J. Mater. Res. 2000, 15, 148.
13. G. Z. Cao, H. Tian, J. Sol-Gel Sci. Technol. 1998, 13, 305.
14. G. Z. Cao, Y. F. Lu, L. Delattre, C. J. Brinker, G. P. López, Adv. Mater. 1996, 8, 588.
15. H. Tian, MS Thesis, University of Washington 1997.
16. C. J. Brinker, G. W. Scherer, Sol-Gel Science, Academic, San Diego, CA 1990, p. 803.
17. X. H. Han, G. Z. Cao, T. Pratum, D. S. Schwartz, B. Lutz, J Mater. Sci., in press.