Theoretical and experimental characterization of TiO2 thin films deposited at oblique angles

Journal of Physics D: Applied Physics

Volumn 44, Issue 38, 2011, Pages

  Alvarez R ^a   Gonzalez Garcia L ^a   Romero Gomez P ^a   Rico, V ^a   Cotrino, J ^a,b   Gonzlez Elipe, A R ^a   Palmero, A ^a  

^a INSTITUTO DE CIENCIA DE MATERIALES DE SEVILLA   (Spain)

^b UNIVERSITY OF SEVILLE   (Spain)

Author keywords

[No Author keywords available]

Indexed keywords

AMORPHOUS TIO; DEPOSITED FILMS; DEPOSITION FLUXES; EXPERIMENTAL CHARACTERIZATION; FILM SURFACES; MICROSTRUCTURAL DEVELOPMENT; MICROSTRUCTURAL FEATURES; MONTE CARLO MODEL; OBLIQUE ANGLES; PHYSICAL VAPOUR DEPOSITION; SHORT RANGE INTERACTIONS; TILT ANGLE; TIO;

ELECTRON BEAMS; FILM GROWTH; MICROSTRUCTURAL EVOLUTION; THIN FILMS; TITANIUM DIOXIDE;

VAPOR DEPOSITION;

EID: 80052749950     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/38/385302     Document Type: Article

References (48)

1. Robbie K and Brett M J 1997 J. Vac. Sci. Technol. A 15 1460
2. Suzuki M and Taga Y 2001 J. Appl. Phys. 90 5599
3. Lakhtakia A, McCall M W, Sherwin J A, Wu Q H and Hodgkinson I J 2001 Opt. Commun. 194 33
4. Mbise G, Smith G B, Niklasson G A and Granqvist G C 1989 Appl. Phys. Lett. 54 987
5. Hodgkinson I and Wu Q H 1999 Appl. Opt. 38 3621
6. Meakin P 1998 Fractals, Scaling and Growth Far from Equilibrium (Cambridge: Cambridge University Press)
7. Pelliccione M and Lu T-M 2008 Evolution of Thin Film Morphology: Modeling and Simulations (Springer Series in Materials Science vol 108) (New York: Springer)
8. Barabsi A L and Stanley H E 1995 Fractal Concepts in Surface Growth (Cambridge: Cambridge University Press)
9. Garcia-Martin J M, Alvarez R, Romero-Gomez P, Cebollada A and Palmero A 2010 Appl. Phys. Lett. 97 173103
10. Schubert E, Hoche T, Frost F and Rauschenbach B 2005 Appl. Phys. A 81 481
11. Zhao Y-P, Ye D-X, Wang G-C and Lu T-M 2002 Nano Lett. 2 351
12. Lintymer J, Martin N, Chappe J-M and Takadoum J 2008 Wear 264 444
13. Zhou C M and Gall D 2008 J. Appl. Phys. 103 014307
14. Kesapragada S V and Gall D 2006 Thin Solid Films 494 234
15. Kesapragada S V, Victor P, Nalamasu O and Gall D 2006 Nano Lett. 6 854
16. Gish D A, Summers M A and Brett M J 2006 Photon. Nanostruct. Fundam. Appl. 4 23
17. Yang H-Y, Lee M-F, Huang C-H, Lo Y-S, Chen Y-J and Wong M-S 2009 Thin Solid Films 518 1590
18. Hawkeye M M and Brett M J 2007 J. Vac. Sci. Technol. A 25 1317
19. Besnard A, Martin N, Carpentier L and Gallas B 2011 J. Phys. D: Appl. Phys. 44 215301
20. Gonzlez-García L, Lozano G, Barranco A, Míguez H and Gonzlez-Elipe A R 2010 J. Mater. Chem. 20 6408
21. Snchez-Valencia J R, Toudert J, Borras A, López-Santos C, Barranco A, Ortega-Feliu I and Gonzlez-Elipe A R 2010 Plasmonics 5 241
22. Snchez-Valencia J R, Toudert J, Gonzlez-García L, Gonzlez-Elipe A R and Barranco A 2010 Chem. Commun. 46 4372
23. Gonzlez-García L, Barranco A, Mũoz-Paez A, Gonzlez-Elipe A R, García-Gutierrez M C, Hernndez J J, Rueda D R, Ezquerra T A and Babonneau D 2010 Chem. Phys. Chem. 11 2205
24. Nieuwenhuizen J M and Haanstra H B 1966 Philips Tech. Rev. 27 87
25. Tait R N, Smy T and Brett M J 1993 Thin Solid Films 226 196
26. Hodgkinson I, Wu Q H and Hazel J 1998 Appl. Opt. 37 2653
27. Kaminska K, Suzuki M, Kimura K, Taga Y and Robbie K 2004 J. Appl. Phys. 95 3055
28. Kaminska K, Amassian A, Martinu L and Robbie K 2005 J. Appl. Phys. 97 013511
29. Buzea C, Beydaghyan G, Elliott C and Robbie K 2005 Nanotechnology 16 1986
30. Karabacak T, Singh J P, Zhao Y-P, Wang G-C and Lu T-M 2003 Phys. Rev. B 68 125408
31. Patzig C, Karabacak T, Fuhrmann B and Rauschenbach B 2008 J. Appl. Phys. 104 094318
32. Ye D-X, Ellison C L, Lim B-K and Lu T-M 2008 J. Appl. Phys. 103 103531
33. Dirks A G and Leamy H J 1977 Thin Solid Films 47 219
34. Ye D-X and Lu T-M 2007 Phys. Rev. B 76 235402
35. Smy T, Vick D, Brett M J, Dew S K, Wu A T, Sit J C and Harris K D 2000 J. Vac. Sci. Technol. A 18 2507
36. Petrov I, Barna P B, Hultman L and Greene J E 2003 J. Vac. Sci. Technol. A 21 117
37. Borovikov V, Shim Y and Amar J G 2007 Phys. Rev. B 76 241401
38. Wang S, Xia G, He H, Yi K, Shao J and Fan Z 2007 J. Alloys Compounds 431 287
39. Lottiaux M, Boulesteix C, Nihoul G, Varnier F, Flory F, Galindo R and Pelletier E 1989 Thin Solid Films 170 107
40. lvarez R, Romero-Gomez P, Gil-Rostra J, Cotrino J, Yubero F, Palmero A and Gonzalez-Elipe A R 2010 J. Appl. Phys. 108 064316
41. lvarez R, Palmero A, Prieto-López L O, Yubero F, Cotrino J, de la Cruz W, Rudolph H, Habraken F H P M and Gonzlez-Elipe A R 2010 J. Appl. Phys. 107 054311
42. Hoang V V 2007 Phys. Status Solidi B 244 1280
43. Müller-Pfeiffer S, van Kranenburg H and Lodder J C 1992 Thin Solid Films 213 143
44. Gupta A, Markworth A J and Saunders J H 1999 J. Mater. Sci. 34 4141
45. Meunier M, Bernier J-S, Sylvestre J-P and Kabashin A V 2008 Appl. Surf. Sci. 254 2771
46. Drotar J T, Zhao Y-P, Lu T-M and Wang G-C 2001 Phys. Rev. B 64 125411
47. Yang H-N, Zhao Y-P, Wang G-C and Lu T-M 1996 Phys. Rev. Lett. 76 3774
48. Kiema G K, Colgan M J and Brett M J 2005 Sol. Energy Mater. Sol. Cells 85 321