Shadowing growth of three-dimensional nanostructures on finite size seeds

Journal of Applied Physics

Volumn 103, Issue 10, 2008, Pages

  Ye, D X ^a   Ellison, C L ^a,c   Lim, B K ^b   Lu, T M ^a  

^a Rensselaer Polytechnic Institute   (United States)

^b CHARTERED SEMICONDUCTOR MANUFACTURING LTD   (Singapore)

^c UNIVERSITY OF COLORADO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; MATHEMATICAL MODELS; MONTE CARLO METHODS; SILICON;

FINITE SIZE SEEDS; SURFACE MOBILITY;

NANORODS;

EID: 44649158303     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2927451     Document Type: Article

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