Simulating structure and optical response of vacuum evaporated porous rugate filters

Journal of Applied Physics

Volumn 95, Issue 6, 2004, Pages 3055-3062

  Kaminska, Kate ^a   Suzuki, Motofumi ^b   Kimura, Kenji ^b   Taga, Yasunori ^c   Robbie, Kevin ^a  

^a QUEEN S UNIVERSITY   (Canada)

^b KYOTO UNIVERSITY   (Japan)

^c Rd Management Section   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPUTER SIMULATION; DEPOSITION; EVAPORATION; MONTE CARLO METHODS; MORPHOLOGY; NUCLEATION; OPTIMIZATION; PORE SIZE; REFRACTIVE INDEX; SCANNING ELECTRON MICROSCOPY; SILICON;

GLANCING ANGLE DEPOSITION (GLAD); VIRTUAL FILM GROWTH SYSTEM (VFIGS);

THIN FILM DEVICES;

EID: 1842531001     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1649804     Document Type: Article

References (30)

1. R. N. Tait, T. Smy, and M. J. Brett, Thin Solid Films 226, 196 (1993).
2. R. Messier and J. E. Yehoda, J. Appl. Phys. 58, 3739 (1985).
3. C. Tang and S. Liang, Phys. Rev. Lett. 71, 2769 (1993).
4. L. Wang and P. Clancy, Surf. Sci. 473, 25 (2001).
5. T. Smy, D. Vick, M. J. Brett, S. K. Dew, A. T. Wu, J. C. Sit, and K. D. Harris, J. Vac. Sci. Technol. A 18, 2507 (2000).
6. M. Suzuki and Y. Taga, J. Appl. Phys. 90, 5599 (2001); 91, 2556(E) (2002).
7. M. Suzuki and Y. Taga, J. Appl. Phys. 90, 5599 (2001); 91, 2556(E) (2002).
8. K. Robbie, M. J. Brett, and A. Lakhtakia, Nature (London) 384, 616 (1996).
9. K. Robbie, A. J. P. Hnatiw, M. J. Brett, R. I. MacDonald, and N. J. McMullin, Electron. Lett. 33, 1213 (1997).
10. K. Robbie and M. J. Brett, J. Vac. Sci. Technol. A 15, 1460 (1997).
11. D. A. Linkens, M. F. Abbod, J. Metcalfe, and B. Nichols, ISA Trans. 40, 2 (2001).
12. B. G. Bovard, Appl. Opt. 32, 5427 (1993).
13. R. Messier, V. C. Venugopal, and P. D. Sunal, J. Vac. Sci. Technol. A 18, 1538 (2000).
14. L. Abelmann and C. Lodder, Thin Solid Films 305, 1 (1997).
15. K. Robbie, C. Shafai, and M. J. Brett, J. Mater. Res. 14, 3158 (1999).
16. K. Kaminska, T. Brown, G. Beydaghyan, and K. Robbie, Appl. Opt. 42, 4212 (2003).
17. W. H. Southwell, Appl. Opt. 28, 5091 (1989).
18. H. A. Abu-Safia, A. I. Al-Sharif, and I. O. Aljarayesh, Appl. Opt. 32, 4831 (1993).
19. P. Meakin, P. Ramanlal, L. M. Sander, and R. C. Ball, Phys. Rev. A 34, 5091 (1986).
20. A. L. Barabasi and H. E. Stanley, Fractal Concepts in Surface Growth (Cambridge University Press, Cambridge, UK, 1995).
21. J. D. Jackson, Classical Electrodynamics, 3rd ed., (J. Wiley, New York, 1999).
22. S. Bosch, J. Ferre-Borrull, N. Leinfellner, and A. Canillas, Surf. Sci. 453, 9 (2000).
23. C. Pecharroman and J. E. Iglesias, Phys. Rev. B 49, 7137 (1994).
24. A. Thelen, Design of Optical Interference Coatings, Optical and Electro-Optical Engineering Series (McGraw-Hill, New York, 1989).
25. R. C. Ross and R. Messier, J. Appl. Phys. 52, 5329 (1981).
26. R. Messier and R. C. Ross, J. Appl. Phys. 53, 6220 (1982).
27. R. A. Roy and R. Messier, J. Vac. Sci. Technol. A 2, 312 (1984).
28. R. Messier, A. P. Giri, and R. A. Roy, J. Vac. Sci. Technol. A 2, 500 (1984).
29. J. E. Yehoda and R. Messier, Appl. Surf. Sci. 22/23, 590 (1985).
30. D. Vick, T. Smy, and M. J. Brett, J. Mater. Res. 17, 2904 (2002).