Glancing angle deposition to control microstructure and roughness of chromium thin films

Wear

Volumn 264, Issue 5-6, 2008, Pages 444-449

  Lintymer, Jan ^a   Martin, Nicolas ^a   Chappe, Jean Marie ^a   Takadoum, Jamal ^a  

^a Centre National de la Recherche Scientifique   (France)

Author keywords

Chromium; Nanoindentation; Roughness; Surface morphology; Thin film; Zigzag

Indexed keywords

CHROMIUM; MICROSTRUCTURE; NANOINDENTATION; SURFACE MORPHOLOGY;

GLANCING ANGLE DEPOSITION (GLAD); ZIGZAG MICROSTRUCTURE;

THIN FILMS;

CHROMIUM; MICROSTRUCTURE; NANOINDENTATION; SURFACE MORPHOLOGY; THIN FILMS;

EID: 37449020887     PISSN: 00431648     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.wear.2006.08.036     Document Type: Article

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