Reducing support loss in micromechanical ring resonators using phononic band-gap structures

Journal of Physics D: Applied Physics

Volumn 44, Issue 37, 2011, Pages

  Hsu, Feng Chia ^a   Hsu, Jin Chen ^b   Huang, Tsun Che ^a   Wang, Chin Hung ^a   Chang, Pin ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

^b NATIONAL YUNLIN UNIVERSITY OF SCIENCE AND TECHNOLOGY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

BAND GAPS; BAND-GAP STRUCTURES; DISPERSION RELATIONS; EIGEN MODES; ENERGY LOSS; FINITE ELEMENT SIMULATIONS; HIGH QUALITY FACTORS; LOW QUALITIES; MICRO-MECHANICAL; MICROMECHANICAL RESONATOR; OPERATING FREQUENCY; QUALITY FACTORS; RESONANT CHARACTERISTICS; RING RESONATOR; STORED ENERGY; SUPPORT LOSS; TRANSMISSION PROPERTY;

ENERGY DISSIPATION; WAVE PROPAGATION; WINE;

OPTICAL RESONATORS;

EID: 80052529242     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/44/37/375101     Document Type: Article

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